公开(公告)号：EP1253399B1

公开(公告)日：2006-06-21

申请号：EP01830277.8

申请日：2001-04-27

Applicant: STMicroelectronics S.r.l.

Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Gardella, Simone

IPC: G01C19/56 ,  G01P9/04

CPC classification number: G01C19/5747

公开(公告)号：EP1253399A1

公开(公告)日：2002-10-30

申请号：EP01830277.8

申请日：2001-04-27

Applicant: STMicroelectronics S.r.l.

Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Gardella, Simone

IPC: G01C19/56 ,  G01P9/04

CPC classification number: G01C19/5747

Abstract: The gyroscope (1) is formed by a driving system (16) including a driving mass (5) having an open concave shape; an accelerometer including a sensing mass (6) and comprising mobile sensing electrodes (18); a linkage (24) connecting the driving mass (5) to the sensing mass (6). The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes (18) extend integral with the sensing mass from the peripheral portion not facing the driving mass (5) and are interleaved with fixed sensing electrodes (19a, 19b). Thereby, there are no passing electrical connections extending below the sensing mass (6). Moreover the linkage includes springs (24) placed equidistant from the center of gravity (G2) of the accelerometer, and the gyroscope (1) is anchored to the substrate with anchoring springs (10) placed equidistant from the center of gravity (G1) of the assembly formed by the driving system (16) and by the accelerometer (23).

Abstract translation: 陀螺仪（1）由包括具有开口凹形的驱动块（5）的驱动系统（16）形成; 包括感测块（6）并包括移动感测电极（18）的加速度计; 将驱动质量块（5）连接到传感块（6）的连杆（24）。 感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。 移动感测电极（18）与不与驱动质量块（5）相对的周边部分与传感质量块成一整体，并与固定感测电极（19a，19b）交错。 因此，在传感块（6）下方没有延伸的电气连接。 此外，连杆包括从加速度计的重心（G2）等距离放置的弹簧（24），并且陀螺仪（1）通过与从重心（G1）等距离放置的锚定弹簧（10）锚定到基板 所述组件由所述驱动系统（16）和所述加速度计（23）形成。