公开(公告)号：EP3346281A1

公开(公告)日：2018-07-11

申请号：EP17172105.3

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

IPC: G01R33/00

CPC classification number: G01R33/0206 ,  G01R33/0023 ,  G01R33/0286 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device (51) is provided with a sensing structure (2) having: a substrate (6); an outer frame (4), which internally defines a window (5) and is elastically coupled to first anchorages (7) fixed with respect to the substrate by means of first elastic elements (8); a mobile structure (10) arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements (12) and carries a conductive path (P) for flow of an electric current (I); and an elastic arrangement (22, 24) operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and of the arrangement of elastic elements, a first sensing movement in response to Lorentz forces originating from a first magnetic-field component (B x ), a second sensing movement in response to Lorentz forces originating from a second magnetic-field component (B y ), and a third sensing movement in response to Lorentz forces originating from a third magnetic-field component (B z ); the first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：EP3346281B1

公开(公告)日：2019-10-09

申请号：EP17172105.3

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

IPC: G01R33/00