公开(公告)号：EP3450992A1

公开(公告)日：2019-03-06

申请号：EP18188857.9

申请日：2018-08-14

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

IPC: G01P15/097 ,  G01P15/18

Abstract: An inertial sensor (1) for sensing an external acceleration, comprising: a first and a second proof mass (6, 8); a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly (14a, 14b, 18a, 18b) configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit (49, 51) configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly (16a, 16b, 20a, 20b, 40), configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

公开(公告)号：EP3450992B1

公开(公告)日：2020-04-01

申请号：EP18188857.9

申请日：2018-08-14

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

IPC: G01P15/097 ,  G01P15/18