公开(公告)号：EP2333572A1

公开(公告)日：2011-06-15

申请号：EP10194490.8

申请日：2010-12-10

Applicant: STMicroelectronics S.r.l.

Inventor： Baldo, Lorenzo ,  Procopio, Francesco ,  Zerbini, Sarah

IPC: G01R33/028 ,  G01R33/038

CPC classification number: G01R33/0286 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/038

Abstract: Two suspended masses (1, 3) are configured so as to be flowed by respective currents (I) flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes (18b). Mobile sensing electrodes (11) are carried by the first suspended mass (1) and are capacitively coupled to respective fixed sensing electrodes (12). The first suspended mass (1) is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction (X). The second suspended mass (3) is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction (Y), and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction (Z).

Abstract translation: 两个悬挂质量（1,3）被构造成以相互横向在磁力计平面中流动的相应电流（I）流动并且电容耦合到下电极（18b）。 移动感测电极（11）由第一悬挂质量（1）承载，并且电容耦合到相应的固定感测电极（12）。 第一悬挂质量块（1）被配置成在存在具有在第一水平方向（X）上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量体（3）被构造为在存在具有在第二水平方向（Y）上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬浮质量体被配置为 在具有垂直方向（Z）的分量的磁场的存在下，在平行于平面的方向上移动并横向于在第一悬置质量块中流动的电流。