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1.发明公开Mold having nanometric features, method for realising such a mold and corresponding use of it in a method for realising an array of carbon nanotubes 审中-公开具有纳米特征的形状，用于制备这样的形式和用于制造的碳纳米管集合体中的方法及其相应的使用
公开(公告)号：EP2107041A2
公开(公告)日：2009-10-07
申请号：EP09156999.6
申请日：2009-03-31
Applicant: STMicroelectronics S.r.l.
Inventor： Vecchione, Raffaele , Occhipinti, Luigi
CPC classification number: H01L51/0012 , B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L51/0048
Abstract: The present invention provides a mold for obtaining, on a substrate, an array of carbon nanotubes with a high control of their positioning wherein such mold comprises a first layer of a first preset material having a surface having in relief at least one first plurality of projections having a free end portion with a substantially pointed profile, a method for obtaining the above-mentioned mold and a method for obtaining the above-mentioned array by using such mold.
Abstract translation: 本发明提供了用于获得，在一个基片，至碳纳米管阵列与它们的定位的高控制的模具worin寻求模具包括第一预设材料的具有具有浮雕突起的至少一个第一多个的表面的第一层 具有带有尖锐的轮廓的自由端部分基本上，为了获得上述的模具和用于通过使用搜索模具获得上述阵列的方法的方法。
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