Power MOSFET device and method of making the same
    1.
    发明公开
    Power MOSFET device and method of making the same 审中-公开
    MOSFET-Leistungsanordnung und Verfahren zu deren Herstellung

    公开(公告)号:EP2339637A1

    公开(公告)日:2011-06-29

    申请号:EP10197215.6

    申请日:2010-12-28

    Abstract: An integrated power MOSFET device formed by a substrate (19, 65); an epitaxial layer (13; 68; 80, 81) of N type ; a sinker region (17b) of P type, extending through the epitaxial layer from the top surface and in electrical contact with the substrate; a body region (22), of P type, extending within the sinker region from the top surface; a source region (25), of N type, extending within the body region from the top surface, the source region delimiting a channel region (22a); a gate region (19); a source contact (30), electrically connected to the body region and to the source region; a drain contact (31), electrically connected to the epitaxial layer (13; 81); and a source metallization region (104), extending over the rear surface and electrically connected to the substrate and to the sinker region.

    Abstract translation: 由衬底(19,65)形成的集成功率MOSFET器件; N型外延层(13; 68; 80,81); P型沉降片区域(17b),从顶表面延伸穿过外延层并与衬底电接触; P型的主体区域(22),从所述顶表面延伸到所述沉降片区域内; 源区域(25),其从所述顶表面在所述体区域内延伸,所述源区域限定沟道区域(22a); 栅极区域(19); 源极触点(30),电连接到所述主体区域和所述源极区域; 电连接到外延层(13; 81)的漏极接触(31); 以及源极金属化区域(104),其在所述后表面上延伸并且电连接到所述衬底和所述沉降弧区域。

Patent Agency Ranking