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1.Multilayer metal structure of supply rings having large parasitic resistance 有权
Title translation: 具有大寄生电阻的电源环的多层金属结构公开(公告)号:EP1369922B1
公开(公告)日:2011-03-09
申请号:EP02425376.7
申请日:2002-06-07
Applicant: STMicroelectronics Srl
Inventor: Montagnana, Marco
IPC: H01L23/528 , H01L27/02
CPC classification number: H01L23/5223 , H01L23/5286 , H01L24/06 , H01L2924/14 , H01L2924/3011 , H01L2924/00