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公开(公告)号：EP1403383B1
公开(公告)日：2012-09-05
申请号：EP03103422.6
申请日：2003-09-17
Applicant: STMicroelectronics Srl
Inventor： SCURATI, Mario
IPC: F04B43/04
CPC classification number: F04B43/043 , B01L3/50273 , B01L7/52 , B01L2300/0816 , B01L2300/1827 , B01L2400/049 , B01L2400/0677
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