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公开(公告)号：EP0978872B1
公开(公告)日：2011-10-12
申请号：EP98830476.2
申请日：1998-08-03
Applicant: STMicroelectronics Srl
Inventor： Mastromatteo, Ubaldo , Villa, Flavio , Barlocchi, Gabriele
IPC: H01L21/762
CPC classification number: H01L21/76294 , H01L21/76264 , H01L21/76272 , H01L21/76289
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