公开(公告)号：JPH08227884A

公开(公告)日：1996-09-03

申请号：JP31648995

申请日：1995-12-05

Applicant: SYMBIOS LOGIC INC

Inventor： GERII AARU SOONBAAGU

IPC: B05D1/18 ,  B05D1/26 ,  B05D7/24 ,  H01L21/00 ,  H01L21/027 ,  H01L21/312

Abstract: PROBLEM TO BE SOLVED: To provide a method of coating a polymer on a square or other non- circular substrate which avoids forming a thick film, without using the polymer wastefully. SOLUTION: The process of coating a polymer on a substrate surface comprises heating a polymer soln. at a pre-selected lower temp. than the flash point of the soln., storing the polymer soln. in a store tank 16, extruding it through a nozzle 14 to form a stationary continuous flow of the soln. which flows from the nozzle 14 back to the tank 16 and again flows out through the nozzle, and moving the substrate 12 having a lower surface at a pre-selected speed over a stationary wave 18 so as to contact the lower surface to this wave 18, thereby coating a uniform film of the polymer on the substrate lower surface.