公开(公告)号：JP2013217910A

公开(公告)日：2013-10-24

申请号：JP2013029867

申请日：2013-02-19

Applicant: Samsung Display Co Ltd ,  三星ディスプレイ株式會社Samsung Display Co.,Ltd.

Inventor： ALEXANDER VORONOV ,  LEE SEOK-HO ,  JEONG JEE-HEAN ,  HEO KYUNG-HOE ,  HAN GYOO-WAN

IPC: G01N27/00 ,  G01B7/00 ,  G01N27/22 ,  H01L21/66

CPC classification number: G01R31/26 ,  G01R31/2648 ,  G01R31/265

Abstract: PROBLEM TO BE SOLVED: To provide a silicon thin film measuring method, a silicon thin film defect detection method, and a silicon thin film defect detector.SOLUTION: A silicon thin film measuring method for measuring crystallinity of a silicon thin film sample and life of a free carrier includes steps of: arranging a capacitive sensor on the silicon thin film sample to be separated therefrom by providing a predetermined air gap; measuring the size of the air gap by utilizing the capacitive sensor without operating an exciting light source module; operating the exciting light source module to irradiate the silicon thin film sample with excitation light of ultraviolet rays; measuring variation of electric conductivity of the silicon thin film sample by utilizing the capacitive sensor; and normalizing the variation of the electric conductivity on the basis of a measurement result of the air gap.

Abstract translation: 要解决的问题：提供硅薄膜测量方法，硅薄膜缺陷检测方法和硅薄膜缺陷检测器。解决方案：用于测量硅薄膜样品的结晶度的硅薄膜测量方法和寿命 自由载体包括以下步骤：通过提供预定的气隙在硅薄膜样品上排列电容式传感器与其分离; 通过利用电容式传感器测量气隙的尺寸而不操作激发光源模块; 操作激发光源模块，用紫外线激发光照射硅薄膜样品; 通过利用电容传感器测量硅薄膜样品的电导率的变化; 并基于气隙的测量结果对电导率的变化进行标准化。

公开(公告)号：US20230201962A1

公开(公告)日：2023-06-29

申请号：US18071041

申请日：2022-11-29

Applicant: Samsung Display Co., Ltd.

Inventor： ALEXANDER VORONOV ,  HYUNGSIK KIM ,  JUNGHWA YOU ,  WOOHYUN JUNG ,  KYUNGHAN YOO

IPC: B23K26/067 ,  B23K26/06 ,  B23K26/0622

CPC classification number: B23K26/0676 ,  B23K26/0652 ,  B23K26/0648 ,  B23K26/0624 ,  B23K2101/36

Abstract: A laser machining device includes: a broadband light source, which generates a broadband laser beam; a first lens unit to which the broadband laser beam is incident and having a first effective focal length; a second lens unit spaced apart from the first lens unit in a first direction and having a second effective focal length; a beam splitter disposed between the first lens unit and the second lens unit, and which is movable in the first direction and a direction opposite to the first direction within the first effective focal length from the first lens unit, and splits the broadband laser beam passing through the first lens unit into a plurality of sub-laser beams; and a focusing lens spaced apart from the second lens unit in the first direction, and which focuses the sub-laser beams passing through the second lens unit on a substrate.

公开(公告)号：US20220162117A1

公开(公告)日：2022-05-26

申请号：US17529736

申请日：2021-11-18

Applicant: Samsung Display Co., Ltd.

Inventor： ALEXANDER VORONOV ,  HYUNGSIK KIM ,  SUNGGYU PARK ,  JUNGHWA YOU ,  JOONGSUNG LEE ,  WOOHYUN JUNG ,  GYOOWAN HAN

IPC: C03C15/00 ,  C03C17/00

Abstract: A method of manufacturing a glass includes forming a first etch protection layer on a first surface of a glass substrate, and forming a second etch protection layer on a second surface of the glass substrate; removing a part of the first protection layer and a part of the second protection layer by applying a laser pulse penetrating the glass substrate from above the first surface of the glass substrate; forming a cut part in the glass substrate by etching the glass substrate using an etching solution; and removing the first etch protection layer and the second etch protection layer. The second surface is opposite to the first surface.

公开(公告)号：US20240002283A1

公开(公告)日：2024-01-04

申请号：US18367706

申请日：2023-09-13

Applicant: Samsung Display Co., Ltd.

Inventor： ALEXANDER VORONOV ,  HYUNGSIK KIM ,  SUNGGYU PARK ,  JUNGHWA YOU ,  JOONGSUNG LEE ,  WOOHYUN JUNG ,  GYOOWAN HAN

IPC: C03C15/00 ,  C03C17/00 ,  C03C23/00

CPC classification number: C03C15/00 ,  C03C17/002 ,  C03C23/0025 ,  C03C2218/328 ,  C03C2218/355

Abstract: A method of manufacturing a glass includes forming a first etch protection layer on a first surface of a glass substrate, and forming a second etch protection layer on a second surface of the glass substrate; removing a part of the first protection layer and a part of the second protection layer by applying a laser pulse penetrating the glass substrate from above the first surface of the glass substrate; forming a cut part in the glass substrate by etching the glass substrate using an etching solution; and removing the first etch protection layer and the second etch protection layer. The second surface is opposite to the first surface.

公开(公告)号：US20220201874A1

公开(公告)日：2022-06-23

申请号：US17536160

申请日：2021-11-29

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JUNGHWA YOU ,  ALEXANDER VORONOV ,  HYUNGSIK KIM ,  JOONGSUNG LEE ,  JEKIL RYU ,  SUNGGYU PARK ,  WOOHYUN JUNG ,  GYOOWAN HAN

IPC: H05K5/00

Abstract: A foldable display device including: a flexible display module including a first area, a second area, and a foldable area between the first area and the second area; a first support part disposed under the flexible display module, and including a plurality of first carbon fibers extending in a first direction; and a second support part disposed under the first support part, and including a plurality of second carbon fibers extending in a second direction.