公开(公告)号：US20150068948A1

公开(公告)日：2015-03-12

申请号：US14281880

申请日：2014-05-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yi Koan HONG ,  Byung Lyul PARK ,  Jumyong PARK ,  Jisoon PARK ,  Kyu-Ha LEE ,  Siyoung CHOI

IPC: H01L21/673

CPC classification number: H01L21/6733 ,  H01L21/6732 ,  H01L21/67323 ,  H01L21/67326

Abstract: Embodiments of the present inventive concepts provide a wafer loader having one or more buffer zones to prevent damage to a wafer loaded in the wafer loader. The wafer loader may include a plurality of loading sections that protrude from a main body and are configured to be arranged at various locations along an edge of the wafer. Each of the loading sections may include a groove into which the edge of the wafer may be inserted. The loading section may include first and second protrusions having first and second inner sides, respectively, that face each other to define the groove therebetween. At least one of the first and second inner sides may include a recess to define the buffer zone.

Abstract translation: 本发明构思的实施例提供了具有一个或多个缓冲区的晶片装载器，以防止损坏装载在晶片装载器中的晶片。 晶片装载机可以包括从主体突出的多个装载部分，并被构造成沿着晶片的边缘布置在不同位置。 每个加载部分可以包括槽，其中可以插入晶片的边缘。 装载部分可以包括分别具有彼此面对以限定其间的凹槽的第一和第二内侧的第一和第二突起。 第一和第二内侧中的至少一个可以包括限定缓冲区的凹部。