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公开(公告)号:SG10201804431UA
公开(公告)日:2019-03-28
申请号:SG10201804431U
申请日:2018-05-24
Applicant: SAMSUNG ELECTRONICS CO LTD
Inventor: HYEOUNGWON SEO , WONSOK LEE , MIN HEE CHO , HYUN-SOOK BYUN
IPC: H01L29/40 , H01L21/28 , H01L21/8242 , H01L27/108
Abstract: A semiconductor device includes a substrate including an active region defined by a device isolation layer. A word line structure is in a trench formed in an upper portion of the substrate. The word line structure includes a gate insulation pattern covering an inner surface of the trench. A gate electrode pattern is on the gate insulation pattern. A first work function pattern is between the gate insulation pattern and the gate electrode pattern. A second work function pattern is on the first work function pattern and extends along a side surface of the gate electrode pattern. The first work function pattern has a top surface at a level below that of a bottom surface of the gate electrode pattern. The first work function pattern has a work function greater than that of the second work function pattern. FIG. 2
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公开(公告)号:SG10201804042RA
公开(公告)日:2019-03-28
申请号:SG10201804042R
申请日:2018-05-14
Applicant: SAMSUNG ELECTRONICS CO LTD
Inventor: HUI-JUNG KIM , MIN HEE CHO , BONG-SOO KIM , JUNSOO KIM , SATORU YAMADA , WONSOK LEE , YOOSANG HWANG
IPC: H01L29/41 , H01L21/8242 , H01L27/108
Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided. FIG. 1
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公开(公告)号:US20230337413A1
公开(公告)日:2023-10-19
申请号:US17981719
申请日:2022-11-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: MIN HEE CHO , MIN TAE RYU , Huije Ryu , SUNGWON YOO , Yongjin Lee , WONSOK LEE
IPC: H01L27/108 , G11C5/06
CPC classification number: H01L27/10814 , G11C5/063 , H01L27/10897 , H01L27/10888 , H01L27/10873 , H01L27/10885 , H01L27/10891
Abstract: Disclosed are semiconductor memory devices and their fabrication methods. The semiconductor memory device comprises a peripheral circuit structure including peripheral circuits on a semiconductor substrate and a first dielectric layer on the peripheral circuits, a cell array structure on the semiconductor substrate, and a shield layer between the peripheral circuit structure and the cell array structure. The cell array structure includes bit lines, first and second active patterns on the bit lines, first word lines that extend in a second direction on the first active patterns, second word lines that extend in the second direction on the second active patterns, data storage patterns on the first and second active patterns, and a second dielectric layer on the semiconductor substrate. A hydrogen concentration of the first dielectric layer is greater than that of the second dielectric layer.
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公开(公告)号:US20220246180A1
公开(公告)日:2022-08-04
申请号:US17481583
申请日:2021-09-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: WONSOK LEE , MIN TAE RYU , WOO BIN SONG , KISEOK LEE , MINSU LEE , MIN HEE CHO
IPC: G11C5/06 , H01L29/06 , H01L27/108
Abstract: A semiconductor memory includes a bit line extending in a first direction, first and second active patterns, which are alternately disposed in the first direction and on the bit line, and each of which includes a horizontal portion and a vertical portion, first word lines disposed on the horizontal portions of the first active patterns to cross the bit line, second word lines disposed on the horizontal portions of the second active patterns to cross the bit line, and an intermediate structure provided in a first gap region between the first and second word lines or in a second gap region between the vertical portions of the first and second active patterns. The first and second active patterns, which are adjacent to each other, may be disposed to be symmetric with respect to each other.
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公开(公告)号:US20220013525A1
公开(公告)日:2022-01-13
申请号:US17172124
申请日:2021-02-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: MIN HEE CHO , HYUNMOG PARK , WOO BIN SONG , MINSU LEE , WONSOK LEE
IPC: H01L27/108
Abstract: A semiconductor memory device is provided. The device may include a lower gate line provided on a substrate and extended in a first direction, an upper gate line vertically overlapped with the lower gate line and extended in the first direction, a first capacitor provided between the lower gate line and the upper gate line, a second capacitor provided between the lower gate line and the upper gate line and spaced apart from the first capacitor in the first direction, a lower semiconductor pattern provided to penetrate the lower gate line and connected to the first capacitor, an upper semiconductor pattern provided to penetrate the upper gate line and connected to the second capacitor, and a lower insulating pattern provided between the second capacitor and the lower gate line to cover the entire region of a bottom surface of the second capacitor.
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公开(公告)号:US20230328961A1
公开(公告)日:2023-10-12
申请号:US17987011
申请日:2022-11-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: MIN HEE CHO , KISEOK LEE , WONSOK LEE
IPC: H01L27/108
CPC classification number: H01L27/10814 , H01L27/10897 , H01L27/10873
Abstract: A semiconductor device includes a first conductive line that extends in a first horizontal direction, a plurality of semiconductor patterns on the first conductive line and spaced apart from each other in the first horizontal direction wherein each of the semiconductor patterns includes a first vertical part and a second vertical part that are opposite to each other in the first horizontal direction, a second conductive line that extends in a second horizontal direction between the first vertical part and the second vertical part of each of the semiconductor patterns, the second horizontal direction intersecting the first horizontal direction, a gate dielectric pattern between the first vertical part and the second vertical part and between the second vertical part and the second conductive line, and a blocking pattern between neighboring semiconductor patterns.
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公开(公告)号:US20230187548A1
公开(公告)日:2023-06-15
申请号:US17976955
申请日:2022-10-31
Applicant: Samsung Electronics Co., Ltd.
Inventor: WONSOK LEE , MIN TAE RYU , SUNGWON YOO , KISEOK LEE , MIN HEE CHO
IPC: H01L29/78 , G11C5/06 , H01L29/08 , H01L29/10 , H01L27/105
CPC classification number: H01L29/7827 , G11C5/063 , H01L27/1052 , H01L29/0847 , H01L29/1033
Abstract: A semiconductor memory device includes bit lines disposed on a substrate and extending in a first direction in parallel to each other, a hydrogen supply insulating layer including hydrogen and filling a space between the bit lines, a source pattern located on each of the bit lines and being in partial contact with the hydrogen supply insulating layer, a hydrogen diffusion barrier layer covering a top surface of the hydrogen supply insulating layer and being in contact with a side surface of the source pattern, a first channel pattern located on the source pattern, a first word line being adjacent to a side surface of the first channel pattern and crossing over the bit lines, and a landing pad on the first channel pattern.
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公开(公告)号:US20170109460A1
公开(公告)日:2017-04-20
申请号:US15277480
申请日:2016-09-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: SUNG-HWAN JANG , SUNGCHUL KIM , JISEONG DOH , WONSOK LEE
IPC: G06F17/50
CPC classification number: G06F17/5009 , G06F17/5081
Abstract: A semiconductor process simulation method includes classifying a semiconductor process simulation into a plurality of blocks based on an annealing simulation, performing a shape simulation corresponding to a block selected from the plurality of blocks, and performing at least two ion implantation simulations among a plurality of ion implantation simulations corresponding to the selected block in parallel, based on result data of the shape simulation corresponding to the selected block.
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