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公开(公告)号:US20230180468A1
公开(公告)日:2023-06-08
申请号:US18052689
申请日:2022-11-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok Lee , Moonyoung Jeong , Jong-Ho Moon , Han-Sik Yoo , Keunnam Kim , Hyungeun Choi
IPC: H01L27/108 , H01L25/065 , H01L25/18 , H01L23/00 , H01L25/00
CPC classification number: H01L27/10897 , H01L24/06 , H01L24/08 , H01L24/80 , H01L25/18 , H01L25/50 , H01L25/0657 , H01L27/10805 , H01L27/10894 , H01L2224/06515 , H01L2224/08145 , H01L2224/80006 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1436
Abstract: A semiconductor memory device may include a cell array structure including first bonding pads, which are electrically connected to memory cells, and a peripheral circuit structure including second bonding pads, which are electrically connected to peripheral circuits and are bonded to the first bonding pads. The cell array structure may include a stack including horizontal conductive patterns stacked in a vertical direction, a vertical structure including vertical conductive patterns , which are provided to cross the stack in the vertical direction, and a power capacitor provided in a planarization insulating layer covering a portion of the stack.
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公开(公告)号:US20240172428A1
公开(公告)日:2024-05-23
申请号:US18518293
申请日:2023-11-22
Applicant: SAMSUNG ELECTRONICS CO.,LTD.
Inventor: KYUNGHWAN KIM , Hyungeun Choi , Keunnam Kim , Seokhan Park , Seokho Shin , Joongchan Shin , Kiseok Lee , Sangho Lee , Moonyoung Jeong
IPC: H10B12/00
CPC classification number: H10B12/50 , H10B12/09 , H10B12/315
Abstract: A semiconductor device is provided. The semiconductor device includes: a lower structure including a bit line; a cell semiconductor body vertically overlapping the bit line, on the lower structure; a peripheral semiconductor body including a portion disposed on a same level as at least a portion of the cell semiconductor body, on the lower structure; and a peripheral gate on the peripheral semiconductor body, wherein the peripheral semiconductor body includes a lower region having a first width and an upper region having a second width, greater than the first width on the lower region.
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公开(公告)号:US20230178505A1
公开(公告)日:2023-06-08
申请号:US18050497
申请日:2022-10-28
Applicant: Samsung Electronics Co.. Ltd.
Inventor: KISEOK LEE , Hyungeun Choi , Gijae Kang , Keunnam Kim , Soobin Yim , Moonyoung Jeong , Seungjae Jung
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L25/00 , H10B12/00
CPC classification number: H01L24/08 , H01L25/0657 , H01L25/18 , H01L24/80 , H01L25/50 , H01L27/10805 , H01L27/10897 , H01L2224/08145 , H01L2224/80006 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1436
Abstract: Semiconductor memory devices may include a cell array structure that may include a memory cell array including three-dimensionally arranged memory cells and first bonding pads connected to the memory cell array and a peripheral circuit structure that may include peripheral circuits and second bonding pads bonded to the first bonding pads. The cell array structure may include a lower dielectric layer having a first surface and a second surface opposite to the first surface, a stack structure including horizontal electrodes stacked in a vertical direction on the first surface of the lower dielectric layer, a vertical structure including vertical conductive patterns that extend in the vertical direction and cross the horizontal electrodes, and an input/output pad on the second surface of the lower dielectric layer.
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公开(公告)号:US20250167107A1
公开(公告)日:2025-05-22
申请号:US18775049
申请日:2024-07-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun Choi , Taejin Park , Suklae Kim , Cheonbae Kim , Sungsoo Yim , Yoona Jang , Hyunyong Jeong
IPC: H01L23/522 , G11C5/06 , H01L23/528 , H10B12/00
Abstract: A semiconductor device is provided. The semiconductor device includes a first structure having a memory block region and an extension region; and a second structure having a peripheral circuit region. The first structure includes memory cells and a word line. The second structure includes a semiconductor body; a through-insulating pattern in the semiconductor body; and a peripheral transistor. The first and second structures include a word line signal path electrically connecting the word line to the peripheral transistor. The word line signal path includes a word line contact that is in contact with the word line in the extension region; a word line routing lower structure electrically connected to the word line contact and extending from the extension region into the memory block region; and a word line routing connection structure electrically connecting the word line routing lower structure to the word line routing peripheral structure.
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公开(公告)号:US11765905B2
公开(公告)日:2023-09-19
申请号:US17185168
申请日:2021-02-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyungeun Choi , Jong-ho Moon , Han-sik Yoo , Kiseok Lee , Sung-hwan Jang , Seungjae Jung , Euichul Jeong , Taehyun An , Sangyeon Han , Yoosang Hwang
IPC: H10B43/40 , H01L23/522 , H01L23/528 , H10B41/10 , H10B41/20 , H10B41/40 , H10B43/10 , H10B43/20
CPC classification number: H10B43/40 , H01L23/5226 , H01L23/5283 , H10B41/10 , H10B41/20 , H10B41/40 , H10B43/10 , H10B43/20
Abstract: A semiconductor memory device may include a peripheral circuit structure including peripheral circuits integrated on a semiconductor substrate in a first region and a first keypad disposed in a second region; a stack provided on the first region of the peripheral circuit structure, the stack including a plurality of first conductive lines extending in a first direction and are vertically stacked; an upper insulating layer covering the stack; an interconnection layer provided on the upper insulating layer; a penetration plug spaced apart from the stack and is provided to penetrate the upper insulating layer to connect the interconnection layer to the peripheral circuits of the peripheral circuit structure; a molding structure provided on the second region of the peripheral circuit structure and spaced apart from the stack in the first direction; and a penetration structure provided to penetrate the molding structure and vertically overlap with the first keypad.
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公开(公告)号:US20250169066A1
公开(公告)日:2025-05-22
申请号:US18826334
申请日:2024-09-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daesun Kim , Suklae Kim , Cheonbae Kim , Youngseok Park , Taejin Park , Hyunchul Yoon , Hyeonkyu Lee , Sungsoo Yim , Hyungeun Choi
IPC: H10B12/00 , G11C11/408 , G11C11/4091 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: Provided is a semiconductor device. The semiconductor device includes: a first connection region, a first memory block region, and a second connection region sequentially arranged; a first peripheral circuit region vertically overlapping with the first memory block region; first memory cells in the first memory block region; a first word line extending into the first and second connection regions by crossing the first memory block region, and electrically connected to the first memory cells; a first sub-word line driver in the first peripheral circuit region; and a first word line signal path electrically connecting the first word line and the first sub-word line driver. The first word line signal path includes at least one first routing contact coupled to the first word line in the first connection region, and at least one second routing contact coupled to the first word line in the second connection region.
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公开(公告)号:US20240074212A1
公开(公告)日:2024-02-29
申请号:US18236607
申请日:2023-08-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun Choi , Kiseok Lee
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H10B12/315 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1436
Abstract: A method of fabricating a semiconductor device may use, as an internal contact region, a region in which a memory cell region overlaps a core and/or peripheral region by bonding at least a partial region of the memory cell region to at least a partial region of the core and/or peripheral region by a direct bonding method, and thus, even when an additional contact region is secured outside the memory cell region to be smaller, signals and/or power may be transmitted between the memory cell region and the core and/or peripheral region.
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公开(公告)号:US11289488B2
公开(公告)日:2022-03-29
申请号:US16744572
申请日:2020-01-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Joongchan Shin , Jiyoung Kim , Hui-Jung Kim , Taehyun An , Eunju Cho , Hyungeun Choi , Sangyeon Han
IPC: H01L27/108 , G11C5/06
Abstract: Disclosed is a semiconductor memory device including a stack structure including layers which are vertically stacked on a substrate and each of which includes a bit line extending in a first direction and a semiconductor pattern extending in a second direction from the bit line, a gate electrode which is in a hole penetrating the stack structure and extending along a stack of semiconductor patterns, a vertical insulating layer covering the gate electrode and filling the hole, and a data storage element electrically connected to the semiconductor pattern. The data storage element includes a first electrode, which is in a first recess of the vertical insulating layer and has a cylindrical shape whose one end is opened, and a second electrode, which includes a first protrusion in a cylinder of the first electrode and a second protrusion in a second recess of the vertical insulating layer.
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公开(公告)号:US20220068859A1
公开(公告)日:2022-03-03
申请号:US17207242
申请日:2021-03-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun Choi , Eun-Ji Kim , Jong-Ho Moon , Hyoungyol Mun , Han-Sik Yoo , Kiseok Lee , Seungjae Jung , Taehyun An , Sangyeon Han , Yoosang Hwang
IPC: H01L23/00 , H01L27/108 , G11C11/408 , G11C11/4091 , H01L25/065 , H01L25/18
Abstract: A three-dimensional semiconductor memory device is provided. The device may include a first substrate including a bit-line connection region and a word-line connection region, a cell array structure on the first substrate, a second substrate including a first core region and a second core region, which are respectively overlapped with the bit-line connection region and the word-line connection region, and a peripheral circuit structure on the second substrate.
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公开(公告)号:US20250157925A1
公开(公告)日:2025-05-15
申请号:US18675252
申请日:2024-05-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun Choi , Jinwoo Han , Seokhan Park
IPC: H01L23/528 , H10B12/00
Abstract: A semiconductor device includes: a substrate including a memory cell region and a contact region; active layers extending in a first horizontal direction and stacked to be spaced apart from each other in a vertical direction on the memory cell region; gate electrodes disposed between the active layers, extending in a second horizontal direction, and stacked to be spaced apart from each other in the vertical direction; connecting conductive lines extending in the first horizontal direction and stacked to be spaced apart from each other in the vertical direction, on the contact region; and vertical conductive patterns extending in the vertical direction and in contact with the active layers, on the memory cell region. Each of the connecting conductive lines are disposed on the same level, among the gate electrodes, and are in contact with the gate electrodes spaced apart from each other in the first horizontal direction.
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