公开(公告)号：US20020075094A1

公开(公告)日：2002-06-20

申请号：US09993095

申请日：2001-11-06

Applicant: Sarnoff Corporation

Inventor： Daniel Bechtle ,  Gordon C. Taylor ,  Ayre Rosen

IPC: H01P001/10

CPC classification number: B81B3/0008 ,  B81B2201/018 ,  G11C23/00 ,  H01G5/40 ,  H01H59/0009 ,  H01P1/127 ,  H01P9/00

Abstract: A microelectronic mechanical systems (MEMS) switch includes a vane formed over a substrate for electrically coupling an input line to an output line formed on the substrate. The vane includes flexible hinges, which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down and pull-back electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.

Abstract translation: 微电子机械系统（MEMS）开关包括形成在衬底上的叶片，用于将输入线电耦合到形成在衬底上的输出线。 叶片包括柔性铰链，其从输入线支撑叶片并允许叶片围绕枢转轴线旋转。 衬底包括用于致动MEMS开关的下拉和拉回电极。 背面电极允许本发明克服静电效应。