公开(公告)号：US20150017483A1

公开(公告)日：2015-01-15

申请号：US14062776

申请日：2013-10-24

Applicant: Seagate Technology LLC

Inventor： Michael R. Feldbaum ,  Wago Wago ,  Bin Lu ,  David S. Kuo

IPC: G11B5/74 ,  H01F10/26

CPC classification number: G11B5/746 ,  G11B5/855 ,  H01F10/123 ,  H01F41/34

Abstract: Provided herein is a method including oxidizing tops of features of a patterned magnetic layer to form oxidized tops of the features; removing an excess of an applied first protective material down to at least the oxidized tops of the features to form a planarized layer; and applying a second protective material over the planarized layer.

Abstract translation: 本文提供了一种方法，包括使图案化磁性层的特征的顶部氧化以形成特征的氧化顶部; 将过量的所施加的第一保护材料除去至少所述特征的氧化顶部以形成平坦化层; 以及在所述平坦化层上施加第二保护材料。