公开(公告)号：KR20100115708A

公开(公告)日：2010-10-28

申请号：KR20100034122

申请日：2010-04-14

Applicant: SEIKO EPSON CORP

Inventor： KASUGA OSAMU

IPC: B05C5/02 ,  B05C11/10 ,  G03F7/16 ,  H01L21/027

CPC classification number: B41J11/0015 ,  B41J3/28 ,  B41J3/407 ,  G02B5/201 ,  G02F1/1303 ,  G02F1/133516 ,  B05C5/0204 ,  B05C11/1007 ,  G03F7/168 ,  H01L21/0274

Abstract: PURPOSE: An apparatus and method for film making are provided to prevent ununiformity by temperature cause. CONSTITUTION: An apparatus(1) for film making comprises: a stage(2) on which a substrate is placed; a head(3) for discharging droplet from a nozzle; a maintenance devices(5,6,7) for maintaining the discharging head; and a chamber for containing the maintenance. The chamber has an image(E1); a maintenance area(E2); a return device(25).

Abstract translation: 目的：提供一种制膜设备和方法，以防止温度不均匀。 构成：用于制膜的装置（1）包括：放置基板的载物台（2）; 用于从喷嘴排出液滴的头部（3）; 用于维持排放头的维护装置（5,6,7） 和一个容纳维修的房间。 腔室具有图像（E1）; 维护区（E2）; 返回装置（25）。

公开(公告)号：JP2014094535A

公开(公告)日：2014-05-22

申请号：JP2012248324

申请日：2012-11-12

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KATO TAKESHI ,  ITO TSUYOSHI ,  KASUGA OSAMU

IPC: B41J2/01

Abstract: PROBLEM TO BE SOLVED: To inspect accurately a droplet dot shape applied onto a recording medium.SOLUTION: An application inspection device for inspecting the application state of a functional fluid applied onto a recording medium includes a stage having a placing surface on which the recording medium is placed, an irradiation part for irradiating the recording medium placed on the state with light, and an imaging part for imaging the functional fluid applied onto the recording medium. The placing surface is a reflection surface for reflecting the light.

Abstract translation: 要解决的问题：准确地检查施加到记录介质上的液滴点形状。解决方案：用于检查施加到记录介质上的功能流体的施加状态的应用检查装置包括具有放置表面的台，记录介质 被放置的照射部分，用于照射具有光的状态的记录介质的照射部分和用于对施加到记录介质上的功能流体进行成像的成像部件。 放置表面是用于反射光的反射表面。

公开(公告)号：JP2009291757A

公开(公告)日：2009-12-17

申请号：JP2008150173

申请日：2008-06-09

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： IWATA YUJI ,  ITO TATSUYA ,  KASUGA OSAMU

IPC: B05C11/10 ,  B05C5/00 ,  B05D1/26 ,  B05D3/00 ,  G02B5/20

CPC classification number: B41J29/38 ,  B41J2/04563 ,  B41J2/04581 ,  B41J2/04588

Abstract: PROBLEM TO BE SOLVED: To discharge a desired quantity of droplets even when the driving states of a head are different. SOLUTION: The droplet discharge device is provided with: a drive voltage generation means generating drive voltage for driving the head; a first temperature acquiring means for acquiring the first temperature of a functional liquid in a head standby state; a second temperature acquiring means for acquiring the second temperature of the functional liquid in a head driving state; a temperature difference calculation means for calculating the temperature difference between the first temperature and the second temperature; and a drive voltage correcting means for correcting drive voltage on the basis of the temperature difference, wherein the drive voltage generating means generates the corrected drive voltage for the head in the driving state. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：即使当头部的驱动状态不同时，也可以排出所需量的液滴。 解决方案：液滴喷射装置设置有：驱动电压产生装置，用于产生用于驱动头部的驱动电压; 第一温度获取装置，用于获取处于待机状态的功能液体的第一温度; 第二温度获取装置，用于获取头部驱动状态下的功能液体的第二温度; 温度差计算装置，用于计算第一温度和第二温度之间的温度差; 以及驱动电压校正装置，用于根据温度差校正驱动电压，其中驱动电压产生装置在驱动状态下产生用于磁头的校正驱动电压。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009288278A

公开(公告)日：2009-12-10

申请号：JP2008137667

申请日：2008-05-27

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： IWATA YUJI ,  ITO TATSUYA ,  KASUGA OSAMU

IPC: G02B5/20 ,  B05C5/00 ,  B05D1/26

Abstract: PROBLEM TO BE SOLVED: To provide a liquid body discharge device capable of suppressing the fluctuation of the discharge quantity in a required pattern formation and the increase of load onto a controller of the liquid body discharge device in the point of time when a discharge means forms the pattern, a liquid body discharge method, a manufacturing apparatus of an electro-optic device, a manufacturing method of an electrooptic device, a manufacturing apparatus for electronic equipment and a manufacturing method of electronic equipment. SOLUTION: The liquid body discharge device for forming the desired pattern on a material where a liquid body is discharged by relatively moving a discharge means for discharging the liquid body and the material on which the liquid body is discharged is provided with a temperature receiving means for receiving temperature in the formation of the desired pattern in the discharge means, a temperature control means for controlling the temperature of the discharge means. The temperature control means controls the temperature of the discharge means in the start of the formation of the desired pattern to the temperature in the formation of the desired pattern. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 解决的问题：提供一种液体排出装置，其能够抑制所需图案形成中的排出量的波动和在液体排出装置的控制器上的负荷增加， 排出装置形成图案，液体排出方法，电光装置的制造装置，电光装置的制造方法，电子设备的制造装置和电子设备的制造方法。 解决方案：通过相对移动用于排出液体的排出装置和排出液体的材料的液体排出的材料上形成所需图案的液体排出装置设置有温度 用于在排出装置中接收形成期望图案的温度的接收装置，用于控制排出装置的温度的温度控制装置。 温度控制装置在形成期望图案的开始时将排出装置的温度控制在所需图案的形成中的温度。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2008229477A

公开(公告)日：2008-10-02

申请号：JP2007072004

申请日：2007-03-20

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KASUGA OSAMU

IPC: B05C5/00

Abstract: PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head capable of discharging a stable amount of a liquid droplets discharged in a short time and forming a uniform liquid pattern on a substrate in a short time, and a liquid droplet discharge device.
SOLUTION: A first cartridge heater H1 low in heat value and a second cartridge heater H2 high in heat value are provided to the head main body 40a of a discharge head 40. When the temperature of a liquid crystal material F is lower than a target temperature and the deviation thereof with the target temperature is large, the second cartridge heater H2 high in heat value is driven to allow the temperature of the liquid crystal material F to rapidly approach the target temperature. When the temperature of the liquid crystal material F approaches the target temperature, the first cartridge heater H1 low in heat value is driven to smoothly converge the temperature of the liquid crystal material F to the target temperature in a short time without repeating overshoot and undershoot to stabilize it.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 解决的问题：提供一种能够在短时间内排出稳定量的液滴排出并在短时间内在基板上形成均匀液体图案的液滴喷射头，以及液滴喷射装置 。 解决方案：将低热值的第一盒式加热器H1和热值高的第二盒式加热器H2提供给排出头40的头主体40a。当液晶材料F的温度低于 目标温度及其与目标温度的偏差大，则驱动热值高的第二筒式加热器H2使液晶材料F的温度快速接近目标温度。 当液晶材料F的温度接近目标温度时，驱动热值低的第一盒式加热器H1在短时间内平滑地将液晶材料F的温度会聚到目标温度，而不会重复过冲和下冲 稳定下来 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2007232867A

公开(公告)日：2007-09-13

申请号：JP2006052200

申请日：2006-02-28

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： IWATA YUJI ,  KASUGA OSAMU

IPC: G02F1/1341 ,  B05C5/00 ,  B05C9/14 ,  B05D1/26 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To provide a pattern forming method in which positional deviation of discharged liquid drop and thermal damage to a substrate are averted, and stability of the discharged amount of the liquid drop comprising a liquid body having high viscosity is improved, and to provide a liquid drop discharge device and a liquid crystal display. SOLUTION: An IR heater 45 is provided on the opposite to X-arrow direction side of a discharge head 40 and the discharge head 40 and the IR heater 45 are moved relative to a mother substrate MA in the opposite to X-arrow direction. Before each region of the mother substrate MA is conveyed to a directly lower part of the discharge head 40, a region on the opposite to X-arrow direction side of the discharge head 40 in a movement locus R of the discharge head 40 to the mother substrate MA is heated locally sequentially. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种图案形成方法，其中避免了排出液滴的位置偏差和对基板的热损伤，并且提高了包括具有高粘度的液体的液滴的排出量的稳定性 ，并提供液滴放电装置和液晶显示器。 解决方案：红外线加热器45设置在排出头40的X方向侧的相对侧，并且排出头40和IR加热器45相对于母材MA移动，与X箭头相反 方向。 在母基板MA的每个区域被输送到排出头40的直接下部之前，在排出头40的移动轨迹R与母体的移动轨迹R相对的排出头40的X方向侧的区域 衬底MA被顺序加热。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2007232866A

公开(公告)日：2007-09-13

申请号：JP2006052199

申请日：2006-02-28

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KASUGA OSAMU ,  IWATA YUJI

IPC: G02F1/1341 ,  B05C5/00 ,  B05C9/14 ,  B05D1/26

Abstract: PROBLEM TO BE SOLVED: To provide a pattern forming method by which positional deviation of a discharged liquid drop and thermal damage of a substrate are avoided and film thickness uniformity of a pattern comprising a liquid body having high viscosity is enhanced, to provide a liquid drop discharging device and to provide a liquid crystal display device. SOLUTION: An infrared (IR) heater 45 is provided on an arrow direction X side of a discharging head 40 and the discharging head 40 and the IR heater 45 are moved relatively to a mother substrate MA in an anti-arrow direction X. When the liquid drop is discharged from the discharging head 40, a region on the arrow direction X side of the discharging head 40 in a movement locus R of the discharging head 40 to the mother substrate MA is locally heated in order and discharged liquid drops are made to flow and join in order. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种图案形成方法，通过该图案形成方法可以避免排出液滴的位置偏差和基板的热损伤，并且增强了包括具有高粘度的液体的图案的膜厚均匀性，以提供 液滴排出装置，并提供液晶显示装置。 解决方案：在排出头40的箭头方向X侧设置有红外（IR）加热器45，并且排出头40和IR加热器45相对于母基片MA沿反箭头方向X移动 当液滴从排出头40排出时，排出头40的在排出头40的移动轨迹R中的箭头方向X侧的区域按照母体基板MA进行局部加热，排出的液体滴下 被制成流动并按顺序加入。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006337951A

公开(公告)日：2006-12-14

申请号：JP2005165928

申请日：2005-06-06

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KASUGA OSAMU ,  GOTO TAKASHI

IPC: G02F1/1341 ,  B05C9/14 ,  B05D1/26 ,  B05D3/02 ,  G02F1/13

Abstract: PROBLEM TO BE SOLVED: To provide a liquid droplet discharging device with which uniformity of volume of a liquid heated and discharged is improved, a liquid droplet discharging method, a method for manufacturing a liquid crystal display device, and the liquid crystal display device. SOLUTION: A head elevation mechanism 37 to make an effective discharge distance between a discharge head 30 and a discharge destination region S variable by vertically moving the discharge head 30 is arranged. A head heater 35 to make an effective discharge temperature of a liquid crystal variable by heating the discharge head 30 is arranged. The effective discharge temperature is controlled to be raised to a target discharge temperature by setting the target discharge temperature corresponding to discharge viscosity for respective kinds of liquid crystals to be discharged and controlling drive of the head heater 35. Furthermore, target discharge distances for which variation values of liquid crystal discharge amounts take on a specified value or less and are nearly identical to one another are set for respective target discharge temperatures (kinds of the liquid crystals), and the effective discharge distance is changed to the target discharge distance by controlling drive of the head elevation mechanism 37. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种提高液体排出液体的体积均匀性的液滴喷出装置，液滴喷射方法，液晶显示装置的制造方法以及液晶显示装置 设备。 解决方案：设置通过垂直移动排放头30可变的排出头30和排出目的地区域S之间的有效放电距离的头部抬高机构37。 布置了通过加热排出头30来使液晶可变的有效排出温度变得高的头部加热器35。 将有效排出温度控制为通过设定与排出的各种液晶的排出粘度对应的目标排出温度并控制头部加热器35的驱动而设定为目标排出温度。而且， 针对各个目标放电温度（液晶的种类）设定液晶放电量的值为规定值以下且几乎相同的值，通过控制驱动将有效放电距离变更为目标放电距离 的抬头机构37.版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2014113513A

公开(公告)日：2014-06-26

申请号：JP2012266935

申请日：2012-12-06

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KASUGA OSAMU ,  KATO TAKESHI ,  ITO TSUYOSHI

IPC: B05D3/00 ,  B05D1/26 ,  B41J2/01 ,  G01B11/28

Abstract: PROBLEM TO BE SOLVED: To provide a discharge inspection method for a discharge-nozzle having high efficiency and high accuracy.SOLUTION: A discharge inspection method includes: an evaluation pattern forming step of discharging liquid to a recording medium including an ink absorption layer from a liquid droplet discharge head, and forming an evaluation pattern in which liquid evaluation dots corresponding to discharge nozzles are arranged; and a discharge-amount evaluating step of evaluating a physical amount of the evaluation dots of the liquid filled in the ink absorption layer, and evaluating discharge characteristics of the discharge nozzles on the basis of this evaluation result. The evaluation pattern forming step includes a preliminary discharge step of discharging at least one component of the liquid to a region including a formation region of the evaluation dots 81 corresponding to the discharge nozzles serving as a discharge inspection target from discharge nozzles different from the discharge nozzles serving as the discharge inspection target, and forming a preliminary discharge pattern 71.

Abstract translation: 要解决的问题：提供一种高效率和高精度的排放喷嘴的排出检查方法。解决方案：排出检查方法包括：评估图案形成步骤，从包括墨吸收层的记录介质排出液体 液滴喷出头，形成与排出喷嘴对应的液体评价点的评价图形; 以及排出量评价步骤，基于该评价结果来评价填充在吸墨层中的液体的评价点的物理量，并评价排出喷嘴的排出特性。 评估图形形成步骤包括：初步排出步骤，用于将排出喷嘴的排出喷嘴与排出喷嘴不同的排出喷嘴排出至包括与用作排出检查对象物的排出喷嘴对应的评价点81的形成区域的区域 作为排出检查对象，形成预备排出图案71。

公开(公告)号：JP2014083760A

公开(公告)日：2014-05-12

申请号：JP2012234489

申请日：2012-10-24

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： ITO TSUYOSHI ,  KATO TAKESHI ,  KASUGA OSAMU

IPC: B41J2/16 ,  B41J2/01

Abstract: PROBLEM TO BE SOLVED: To reduce man-hours spent on the processes for checking and preserving an injection head.SOLUTION: A method for checking and preserving an injection head is provided, the method comprising: a checking process of feeding transparent ink into the injection head, and performing injection checking of the injection head by using the transparent ink; and a preserving process of preserving the injection head in a state where the transparent ink is being fed into the injection head.

Abstract translation: 要解决的问题：减少在检查和保存注射头的过程中花费的时间。解决方案：提供一种用于检查和保持注射头的方法，所述方法包括：将透明墨水供入注射器的检查过程 并通过使用透明油墨进行喷射头的喷射检查; 以及在透明油墨被供给到喷射头中的状态下保持喷射头的保存过程。