公开(公告)号：EP1540404A1

公开(公告)日：2005-06-15

申请号：EP03724577.6

申请日：2003-05-14

Applicant: Silicon Light Machines Corporation

Inventor： GUDEMAN, Christopher ,  STAKER, Bryan ,  HUNTER, James ,  YEH, Richard ,  AMM, David, T.

IPC: G02B26/00

CPC classification number: B81C1/00111 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81C2201/0109 ,  G02B26/0808

Abstract: A MEM device including one or more movable micro-structures (704) which are ribbon or cantilever structures. The ribbon or cantilevers structures are coupled to a substrate (701) through one or more support regions (703) having a plurality of anchor support features (711,711’) and a plurality of post support features (713,713’). The MEM device is an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions (703) each having a plurality of anchor support features (711,711’) and a plurality of post support features (713,713’).

Abstract translation: 包括一个或多个带状或悬臂结构的可移动微结构（704）的MEM装置。 带或悬臂结构通过具有多个锚支撑特征（711,711'）和多个支柱支撑特征（713,713'）的一个或多个支撑区域（703）耦合到衬底（701）。 MEM设备是具有多个可移动带状结构的光学MEM设备，每个可移动带状结构通过支撑区域（703）由相对端支撑，每个支撑区域具有多个锚固支撑特征（711,711'）和多个支柱支撑特征（713,713'） 。