公开(公告)号：EP1620349A2

公开(公告)日：2006-02-01

申请号：EP04727485.7

申请日：2004-04-15

Applicant: Simpler Networks Inc.

Inventor： M NARD, Stéphane ,  LASSONDE, Normand ,  VILLENEUVE, Jean-Claude

IPC: B81B3/00

CPC classification number: H01H61/04 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/051 ,  B81B2203/053 ,  F03G7/06 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: The MEMS cantilever actuator (10) is designed to be mounted on a substrate (12). The actuator (10) comprises an elongated hot arm member (20) having two spaced-apart portions (22), each provided at one end with a corresponding anchor pad (24) connected to the substrate (12). The portions (22) are connected together at a common end (26) that is opposite the anchor pads (24). It further comprises an elongated cold arm member (30) adjacent to and substantially parallel of the hot arm member (20), the cold arm member (30) having at one end an anchor pad (32) connected to the substrate (12), and a free end (34) that is opposite the anchor pad (32) thereof. A dielectric tether (40) is attached over the common end (26) of the portions (22) of the hot arm member (20) and the free end (34) of the cold arm member (30). This actuator (10) allows improving the performance, reliability and manufacturability of MEMS switches (100).