公开(公告)号：FI20195772A1

公开(公告)日：2021-03-17

申请号：FI20195772

申请日：2019-09-16

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： TAPPURA KIRSI ,  KESTUTIS GRIGORAS ,  PRUNNILA MIKA ,  VARPULA AAPO ,  TIIRA JONNA

IPC: G01J5/02 ,  H01L27/144 ,  H01L35/32 ,  H01L35/34

Abstract: According to an example aspect of the present invention, there is provided a detector comprising an optically absorbing membrane (111) suspended over a cavity between the membrane (111) and a substrate (140), the substrate (140) comprised in the detector, and a thermoelectric transducer (120, 130) attaching the optically absorbing membrane (111) over the cavity, wherein the optically absorbing membrane (111) forms a contacting element between n-type and p-type thermoelectric elements (120, 130) of the thermoelectric transducer (120, 130).