公开(公告)号：FI20205318A1

公开(公告)日：2021-10-01

申请号：FI20205318

申请日：2020-03-31

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： STUNS INGMAR ,  KESKISAARI AKI ,  TOIVANEN HANS ,  HOLMLUND CHRISTER

IPC: G01J3/26 ,  G02B5/28 ,  G02B26/00 ,  G02F1/21

Abstract: A Fabry-Perot interferometer (300) comprises: - a first mirror plate (100) comprising a first semi-transparent mirror (M1), - a second semi-transparent mirror (M2) to define an optical cavity together with the first mirror (M1), and - one or more first supporting elements (S1) to support the first mirror plate (100), wherein the first mirror plate has a first substantially planar surface (SRF11) and a second substantially planar surface (SRF12) defining the maximum thickness (h100) of the first mirror plate (100), wherein the first mirror plate (100) is bonded to the one or more first supporting elements (S1) by three or more joints (J1), wherein each joint (J1) is bonded to the first mirror plate (100) at a bonding region (REG1), wherein the distance (d1) between each bonding region (REG1) and the first substantially planar surface (SRF11) is greater than 30% of the thickness (h100) of the mirror plate (100), and the distance (d2) between each bonding region (REG1) and the second substantially planar surface (SRF12) is greater than 30% of the thickness (h100) of the mirror plate (100).