公开(公告)号：US20020105699A1

公开(公告)日：2002-08-08

申请号：US09775867

申请日：2001-02-02

Applicant: TERAVICTA TECHNOLOGIES, INC

Inventor： Robert F. Miracky ,  Jason D. Reed ,  Kai Hu ,  Claude Hilbert

IPC: H04B010/04 ,  G02B006/12 ,  H04B010/00 ,  H01S003/00 ,  G02B013/14 ,  H01S003/08 ,  G02F001/29

CPC classification number: G02B6/3524 ,  G02B6/1245 ,  G02B6/32 ,  G02B6/3526 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3598 ,  G02B6/4204 ,  G02B6/4232 ,  G02B6/4249 ,  G02B6/43 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/01039 ,  H01S3/101 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/02248 ,  H01S5/02296 ,  H01S5/183 ,  H01L2924/00014

Abstract: An apparatus and method of fabricating and operating a micro-electromechanical systems (MEMS) integrated optical structure is disclosed. Micro-optics is integrated with MEMS actuators to provide a building block for a micro-optical communication device. Such micro-optical communication device may realize a variety of optical communication systems including optical interconnects, laser communications, or fiber optic switches. In accordance with one aspect of the present invention, a micro-optical element such as a micro-lens is advantageously integrated with an actuator such as MEMS comb drive actuator to form a MEMS lens assembly. The MEMS lens assembly is further coupled to an optical source which may provide a MEMS integrated micro-optical communication device. This integration substantially obviates the generally needed external or manual positioning of the micro-optical element to align a light beam or an optical signal being emitted from the optical source. The MEMS comb drive actuator, responsive to an actuation force, selectively positions the micro-optical element. By appropriately micro positioning a micro-optical element such as a micro-lens relative to an optical source, such as an input optical fiber or a laser diode, a focused light beam or an optical signal may be coupled to a respective optical fiber or a detector. In one embodiment, a commonly used flip chip module assembly technique may be adapted for bonding the MEMS lens assembly to a carrier substrate, which preferably receives the optical source. The carrier substrate is generally disposed on a host assembly. A flip chip based passive alignment of the MEMS lens assembly could be provided. Additionally, an active alignment of the light beam or optical signal with an optical detector may be provided, which can be maintained through a feedback loop.

Abstract translation: 公开了一种制造和操作微机电系统（MEMS）集成光学结构的装置和方法。 微光学与MEMS致动器集成，为微光通信设备提供一个构建模块。 这种微光通信设备可以实现包括光互连，激光通信或光纤交换机的各种光通信系统。 根据本发明的一个方面，诸如微透镜的微光学元件有利地与诸如MEMS梳状驱动致动器的致动器集成以形成MEMS透镜组件。 MEMS透镜组件还耦合到可以提供MEMS集成微光通信设备的光源。 该集成基本上消除了通常需要的外部或手动定位微光学元件以对准从光源发射的光束或光信号。 响应于致动力的MEMS梳驱动致动器选择性地定位微光学元件。 通过相对于诸如输入光纤或激光二极管等光源的微透镜适当微定位微光学元件，聚焦光束或光信号可以耦合到相应的光纤或 探测器。 在一个实施例中，常用的倒装芯片组件技术可适用于将MEMS透镜组件接合到优选接收光源的载体衬底。 载体基板通常设置在主机组件上。 可以提供MEMS透镜组件的基于倒装芯片的无源对准。 此外，可以提供光束或光信号与光学检测器的主动对准，其可以通过反馈回路来维持。