公开(公告)号：CA879353A

公开(公告)日：1971-08-24

申请号：CA879353D

Applicant: TEXAS INSTRUMENTS INC

Inventor： JACKSON EDMOND D ,  FORT CHARLES P ,  ABLES BILLY D

公开(公告)号：CA879355A

公开(公告)日：1971-08-24

申请号：CA879355D

Applicant: TEXAS INSTRUMENTS INC

Inventor： JAEGER HANS A ,  BAGGALEY LEONARD ,  JACKSON EDMOND D ,  HARRELL SAMUEL A ,  FORT CHARLES P

公开(公告)号：CA879354A

公开(公告)日：1971-08-24

申请号：CA879354D

Applicant: TEXAS INSTRUMENTS INC

Inventor： HARRELL SAMUEL A ,  JACKSON EDMOND D ,  JAEGER HANS A

公开(公告)号：US2780757A

公开(公告)日：1957-02-05

申请号：US52583755

申请日：1955-08-02

Applicant: TEXAS INSTRUMENTS INC

Inventor： THORNHILL JAY W ,  JACKSON EDMOND D

IPC: H01L23/473 ,  H01L25/03

CPC classification number: H01L23/473 ,  H01L25/03 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：US3083341A

公开(公告)日：1963-03-26

申请号：US74351658

申请日：1958-06-09

Applicant: TEXAS INSTRUMENTS INC

Inventor： GALE WHITE ,  JACKSON EDMOND D

IPC: G01V1/24

CPC classification number: G01V1/245

公开(公告)号：US2949498A

公开(公告)日：1960-08-16

申请号：US54384655

申请日：1955-10-31

Applicant: TEXAS INSTRUMENTS INC

Inventor： JACKSON EDMOND D

IPC: H01L25/04 ,  H01L31/00

CPC classification number: H01L31/00 ,  H01L31/043 ,  Y02E10/50

公开(公告)号：US3563648A

公开(公告)日：1971-02-16

申请号：US3563648D

申请日：1967-10-18

Applicant: TEXAS INSTRUMENTS INC

Inventor： BAGGALEY LEONARD ,  HARRELL SAMUEL A ,  JACKSON EDMOND D ,  FORT CHARLES ,  JAEGER HANS

IPC: G03B27/44 ,  G03F7/20 ,  G05B19/18

CPC classification number: G03F7/70275 ,  G03B27/44 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/70883 ,  G05B19/188

Abstract: A FILM SUPPORT TABLE IS MOVABLE IN THE X AND Y COORDINATE DIRECTIONS BY X AND Y DRIVE SYSTEMS. A LASER INTERFEROMETER AND FRINGE COUNTER DETECTS MOVEMENT OF THE TABLE IN THE X AND Y COORDINATE DIRECTIONS BY FRINGE COUNTS. A PROJECTION SYSTEM SIMULTANEOUSLY PROJECTS A PLURALITY OF IMAGES ONTO THE FILM CARRIED BY THE TABLE AFTER THE TABLE IS MOVED TO EACH OF A PLURALITY OF PREDETERMINED EXPOSURE POSITIONS. A REFERENCE DETECTOR SYSTEM DETECTS WHEN THE TABLE IS AT A ZERO REFERENCE POSITION AND RESETS THE COUNTERS. A DIGITAL COMPUTER IS PROGRAMMED TO COMPUTE THE COORDINATE OF EACH EXPOSURE POSITION AND THEN, BASED ON THE CURRENT BAROMETRIC PRESSURE, COMPUTE THE DISTANCE IN FRINGE COUNTS FROM THE REFERENCE POSITIN TO THE FIRST EXPOSURE POSITION. THE COMPUTER THEN OPERATES THE DRIVE SYSTEM IN SUCH A MANNER AS TO MOVE THE TABLE TO THE EXPOSURE POSITION BY CONTINUOUSLY COMPUTING THE POSITION AND VELOCITY OF THE TABLE FROM THE READINGS OF THE FRINGE COUNTERS. THE TABLE IS MAINTAINED AT THE EXPOSURE POSITION DURING THE EXPOSURE PERIOD BY CONTINUOUSLY DETERMINING THE POSITION OF THE TABLE FROM THE FRINGE COUNTERS AND OPERATING THE DRIVE SYSTEM TO PRODUCE FORCES FOR CORRECTING THE POSITIONAL ERROR. THE COMPUTER THEN COMPUTES THE LOCATION OF THE NEXT EXPOSURE POSITION IN FRINGE COUNTS FROM THE REFERENCE POSITION BASED ON THE THEN CURRENT BAROMETRIC PRESSURE AND THE PRECEDURE REPEATED.

公开(公告)号：US2840770A

公开(公告)日：1958-06-24

申请号：US49412955

申请日：1955-03-14

Applicant: TEXAS INSTRUMENTS INC

Inventor： JACKSON EDMOND D

IPC: B28D5/00 ,  H01L21/00 ,  H01L21/24 ,  H01L21/304 ,  H01L23/10 ,  H01L23/14 ,  H01L29/417 ,  H01L29/43 ,  H01L29/72

CPC classification number: H01L29/43 ,  B28D5/00 ,  H01L21/00 ,  H01L21/24 ,  H01L21/304 ,  H01L23/10 ,  H01L23/14 ,  H01L29/417 ,  H01L29/72 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/48463 ,  H01L2224/4918 ,  H01L2224/49505 ,  H01L2924/00011 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/01015