公开(公告)号：US12212298B2

公开(公告)日：2025-01-28

申请号：US17877206

申请日：2022-07-29

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Hakhamanesh Mansoorzare ,  Ting-Ta Yen ,  Jeronimo Segovia-Fernandez ,  Bichoy Bahr

IPC: H03H3/007 ,  H03H9/02 ,  H03H9/10

Abstract: A micro-mechanical resonator die includes: micro-mechanical resonator die layers; a cavity formed in at least one of the micro-mechanical resonator die layers; and a micro-mechanical resonator suspended in the cavity. The micro-mechanical resonator includes: a base; a first resonator portion extending from the base along a first plane; and a second resonator portion extending from the base along a second plane. The first resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the first resonator portion out of the first plane. The second resonator portion is configured to operate in an out-of-plane flexural mode that displaces at least part of the second resonator portion out of the second plane and out-of-phase relative to the first resonator portion.