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公开(公告)号：US20240072756A1
公开(公告)日：2024-02-29
申请号：US17900599
申请日：2022-08-31
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Shaoping TANG , Keegan MARTIN , Ting-Ta YEN
CPC classification number: H03H9/02015 , H03H9/171
Abstract: A BAW resonator includes first and second electrodes located over a substrate. A piezoelectric layer is located between the first and second electrodes. A guard ring is located between the piezoelectric layer and the second electrode, and is spaced apart from a perimeter of the electrode. The guard ring has a width in a range from 2.5 μm to 3.5 μm.
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