公开(公告)号：EP0877272B1

公开(公告)日：2002-07-31

申请号：EP98201538.0

申请日：1998-05-04

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Florence, James M. ,  Huffman, James ,  Miller, Rodney

IPC: G02B26/08

CPC classification number: G02B26/0841

公开(公告)号：EP0877272A1

公开(公告)日：1998-11-11

申请号：EP98201538.0

申请日：1998-05-04

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Florence, James M. ,  Huffman, James ,  Miller, Rodney

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize defraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.

Abstract translation: 由具有支撑柱（74）的微镜阵列（72）组成的空间光调制器（70）。 支撑柱（74）在反射镜（72）的上表面中限定支撑柱边缘（76）。 这些支撑柱边缘（76）都相对于来自光源（80）的入射光束以45度的角度取向，以使得当反射镜被定向在暗视场光学器件中时，将光从边缘（76）的光的最小化 离州。 与常规设计相比，本发明实现了比20％提高的对比度。