公开(公告)号：US20230238410A1

公开(公告)日：2023-07-27

申请号：US17586001

申请日：2022-01-27

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Henry Edwards ,  Rahmi Hezar ,  Udumbara Wijesinghe ,  Wenjuan Fan ,  Gerd Schuppener

IPC: H01L27/146

CPC classification number: H01L27/14623 ,  H01L27/14643 ,  H01L27/1463 ,  H01L27/14685

Abstract: The present disclosure generally relates to a surface grating in a photodetector device. In an example, a semiconductor device structure includes a photodetector device. The photodetector device includes one or more photodiodes disposed in or over a semiconductor substrate, and includes a surface grating disposed at a respective surface of each photodiode of the one or more photodiodes. The surface grating has one or more periodicities. Each periodicity of the one or more periodicities has a period that is along a direction parallel to a first lateral direction across the semiconductor substrate and that is equal to or less than half of a dimension of at least one photodiode of the one or more photodiodes along a direction parallel to the first lateral direction. The one or more periodicities includes multiple different pitches.