公开(公告)号：US20170358729A1

公开(公告)日：2017-12-14

申请号：US15538632

申请日：2015-12-23

Applicant: THALES

Inventor： Afshin ZIAEI ,  Matthieu LE BAILLIF ,  Paolo MARTINS ,  Shailendra BANSROPUN

IPC: H01L41/08 ,  H01H59/00 ,  B81B3/00 ,  H01G5/18 ,  H01G5/16 ,  H01H57/00 ,  H01L41/09

CPC classification number: H01L41/08 ,  B81B3/0021 ,  B81B7/0019 ,  B81B2201/018 ,  H01G5/16 ,  H01G5/18 ,  H01H57/00 ,  H01H59/0009 ,  H01H2057/006 ,  H01L41/0933

Abstract: According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.