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公开(公告)号：JPH10142489A
公开(公告)日：1998-05-29
申请号：JP30517596
申请日：1996-11-15
Applicant: TORAY INDUSTRIES
Inventor： KAWAMURA AKINORI
Abstract: PROBLEM TO BE SOLVED: To remove the influence of reflected light from the reverse surface of a light-transmissive body and improve the detection precision of a focus adjustment state by finding a focusing state by a focus photodetection part on the basis of reflected light received from outside the periphery of an optical axis. SOLUTION: The light beam emitted by a laser light source 1 has its direction changed by a half-mirror 2 and is converged by a lens 3 to irradiate the surface of the light-transmissive body 4. This light beam is reflected by the surface of the body 4, passed through the half-mirror 2, and converged on a knife-edge 6 by a detection lens 5. The light beam which is not cut off by the knife-edge 6 is made incident on a focus detection two-split sensor 7. The reflected light beam from the reverse surface of the body 4 is converged by lenses 3 and 5 to reach a sensor 7 while diverged again. The sensor 7 adopts a sensor having an independent photodetection position not in an area nearby the center of the optical axis so as to detect a reflected light component except the reflected light beam in the area nearby the center of the optical axis.
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公开(公告)号：JPH08152404A
公开(公告)日：1996-06-11
申请号：JP29540594
申请日：1994-11-29
Applicant: TORAY INDUSTRIES
Inventor： UKAWA SHUICHI , KAWAMURA AKINORI
Abstract: PURPOSE: To accurately measure an optical constant by removing the influence of a reflection light beam from the rear face of a base board having transparency. CONSTITUTION: An incident light beam is collected by a lens 3 to be allowed to enter a surface of a base board 4 having transparency. When the reflection light beam from the base board 4 having transparency is cast on a detector array 5 by the lens 3, a diameter of the reflection beam from the rear face of the base board 4 is reduced. The optical constant is calculated based on an output signal from sensor elements in a range except a range of the beam diameter.
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Patent Agency Ranking
公开(公告)号：JPH10142492A
公开(公告)日：1998-05-29
申请号：JP31867396
申请日：1996-11-14
Applicant: TORAY INDUSTRIES
Inventor： KAWAMURA AKINORI
Abstract: PROBLEM TO BE SOLVED: To accurately and easily detect the focusing position of coherent light by providing a light quantity characteristic output means which outputs variation characteristics of a detected light quantity when a body is displaced relatively to an optical system as characteristics including at least a maximum or minimum value. SOLUTION: Laser light 2 as coherent light from a laser light source 1 is passed through a half-mirror 3, and converged by an objective 4 to t irradiate the surface of a sample 5. A sensor 6 detects the quantity of part of the laser light transmitted through the halfmirror 3. The signal from the sensor 6 is inputted to an arithmetic processor 13, which calculates variation characteristics of the detected light quantity. Its arithmetic output C is outputted from an output device 14 such as a display. When the height of the sample 5 is adjusted to the position (height) where the quantity of the laser light that the sensor 6 receives varies to the largest value, the laser light can accurately be converged on the surface of the sample 5. Namely, the laser light is in focus.
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公开(公告)号：JPH09196630A
公开(公告)日：1997-07-31
申请号：JP2316396
申请日：1996-01-16
Applicant: TORAY INDUSTRIES
Inventor： KAWAMURA AKINORI , HAYASHI MUTSUMI , SATO MAKOTO
Abstract: PROBLEM TO BE SOLVED: To enable measurement of various optical constants of a thin film formed on a substrate or the surface thereof by arranging an irradiation optical system, a photodetecting optical system and a measuring head comprising a light intensity distribution sensor and an optical constant calculator in a compact designing. SOLUTION: Laser light from a laser light source 10 (e.g. semiconductor laser light source) is reflected on a half mirror 11 and condensed with a convex lens 12 (condenser lens) to irradiate a sample 4. The reflected light 7 from the sample 4 is guided to a light intensity distribution sensor 9 by a photodetecting optical system 8. The light intensity distribution sensor 9 detects an intensity distribution within a light beam of the reflected light 7 guided through the photodetecting optical system 8. The light intensity distribution (reflection factor distribution) detected is collated with a theoretical reflection factor distribution to calculate an optical constant of the sample as object. This calculation is performed by an optical constant calculator 3 which, for example, comprises a microcomputer.
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公开(公告)号：JPH03152615A
公开(公告)日：1991-06-28
申请号：JP29192189
申请日：1989-11-09
Applicant: TORAY INDUSTRIES
Inventor： ASADA HIROYOSHI , KAWAMURA AKINORI
Abstract: PURPOSE:To display a multi-stage shift state with high operability and high economical properties by showing the information contents at a light transmissive part of a key top in accordance with the emission of a light source selected in response to an optional shift position of a multi-stage shift. CONSTITUTION:The corresponding light sources 2a-2c are selected in response to the shift position of a multi-stage key 1. The information 3a corresponding to the shift position is displayed at a light transmissive part of the key 1. Thus it is possible to obtain a keyboard containing the keys that can display the multi-stage shift state with high operability and high economical properties.
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公开(公告)号：JP2000056236A
公开(公告)日：2000-02-25
申请号：JP22117998
申请日：1998-08-05
Applicant: TORAY INDUSTRIES
Inventor： KAWAMURA AKINORI
Abstract: PROBLEM TO BE SOLVED: To efficiently and automatically perform focusing operation by provid ing a means for outputting a focusing signal based on the spreading of photodetecting area of reflected light. SOLUTION: One part of reflected light from the surface of a sample 3 is transmitted through a half mirror 9 and such a part is reflected on a half mirror 11, guided through a condenser lens 12 to a beam splitter 13 and guided from there to an A sensor 14 and a B sensor 15 constituting of array sensors. On the opposite side of a light source 8 of the half mirror 9, a sensor 16 (I sensor) is provided as a light quantity detecting means for detecting the quantity of light in proportion to the total emitted light quantity of coherent light from the light source 8. The quantity of coherent light from the light source 8 detected by the I sensor 16 is remarkably changed at a focusing position or extremely nearby position. By grasping this change, the focusing position can be exactly detected. The control of a motor is performed while using a computer based on signals from these A and B sensors 14 and 15 and I sensor 16.
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公开(公告)号：JPH0346280A
公开(公告)日：1991-02-27
申请号：JP18153289
申请日：1989-07-13
Applicant: TORAY INDUSTRIES
Inventor： ASADA HIROYOSHI , KAWAGUCHI HIROSHI , KAWAMURA AKINORI
Abstract: PURPOSE:To enable a light emitting diode to emit light rays of different wavelengths at the same time from the same light projection position and to prevent problems such as a coupling loss and an image-forming position by a method wherein the light emitting diode is provided with a laminar structure composed of two or more p-type semiconductor layers, two p-type semiconductor layers adjacent to each other form a heterojunction, and the p-type semiconductor layers are specified in forbidden bandwidth. CONSTITUTION:A light emitting diode is provided with a p-type semiconductor 1, an n-type semiconductor 2, and a single p-n heterojunction 3, where the p-type semiconductor 1 is composed of p-type semiconductor layers P1 and P2 which form a heterojunction 4. Provided that the forbidden bandwidths of the p-type semiconductor P1 and P2 and the n-type semiconductor 2 are represented by Ep1, Ep2, and En respectively, they are so set as to satisfy a formula, En>Ep1>Ep2. The thickness of the p-type semiconductor layer P1 is smaller than the diffusion length of minor carriers which are injected from the n-type semiconductor 2 into the p-type semiconductor 1. By this setup, light rays of different wavelengths can be obtained from the same projection position at the same time, and for instance, problems such that light rays of different wavelengths are not equal in coupling loss and have not the same image-forming position can be eliminated.
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