公开(公告)号：JPS6457000A

公开(公告)日：1989-03-03

申请号：JP21308187

申请日：1987-08-28

Applicant: TOSHIBA CORP

Inventor： HENMI KAZUHIRO ,  KONDO TAKESHI ,  ONO TOMIO ,  TANUMA CHIAKI ,  EGAWA TETSUYA

IPC: F04D33/00

Abstract: PURPOSE:To enable a large amount of air to be generated while eliminating the necessity for adjusting a driving resonance frequency of a piezoelectric fan by constituting a resonance circuit of the piezoelectric fan using a piezoelectric bimorph element, feedback circuit and an amplifier and driving the piezoelectric fan by self-oscillation. CONSTITUTION:A piezoelectric fan is constituted of an oscillation plate 4, piezoelectric thin plates 3a, 3b and electrodes 1a, 1b formed in both main surfaces of the piezoelectric thin plates. Here forming a feedback electrode 2 for monitoring a driving condition of the piezoelectric fan on one side main surface, an output signal of the feedback electrode 2 is input to an amplifying circuit B via a feedback circuit A, and an output signal of this amplifying circuit B is fed back to a driving signal of the piezoelectric fan. That is, constituting a resonance circuit of the piezoelectric fan, feedback circuit A and the amplifying circuit B, the piezoelectric fan is driven by self-oscillation.

公开(公告)号：JPH01268077A

公开(公告)日：1989-10-25

申请号：JP9643188

申请日：1988-04-19

Applicant: TOSHIBA CORP

Inventor： ONO TOMIO ,  EGAWA TETSUYA

IPC: B23Q1/36 ,  H01L41/09

Abstract: PURPOSE:To obtain a two-dimensional micromotion stage which can be moved in the directions of (x), (y) and theta at a high speed, by a constitution wherein a plurality of bimorph type piezoelectric displacement elements are fixed at four points, rigidity is high, therefore a body to be driven, large in weight, can be mounted, the resonant frequency is high, and therefore the effect of external vibration is hard to exert. CONSTITUTION:A base table 6 is provided. First linking members 11 to 14 are fixed to four points which are positioned on the base table 6 at an equal interval. Second linking members 21 to 24 which are free from the base table 6 are arranged at intermediate points between the first linking members 11 to 14. A third linking member 3 is arranged at the central position of the arrangement of the first and second linking members 11 to 14 and 21 to 24. The linking member 3 is free from the base table 6 and serves the role of a stage on which a body to be driven is mounted. Bimorph type piezoelectric displacement elements 51 to 512 are arranged in the reverse directions one another with the intermediate points as boundaries between the first and third linking members 11 to 14, 21 to 24 and 3, respectively. Both ends of the elements 51 to 512 are linked to the linking members 11 to 14, 21 to 24 and 3 in a fixed pattern. The polarizing directions of the elements 51 to 512 are in parallel with the surface of the base table 6.

公开(公告)号：JPH01235288A

公开(公告)日：1989-09-20

申请号：JP6025188

申请日：1988-03-16

Applicant: TOSHIBA CORP

Inventor： HENMI KAZUHIRO ,  ONO TOMIO ,  EGAWA TETSUYA

IPC: H01L41/09 ,  H01L41/08

Abstract: PURPOSE:To inhibit the lowering of the displacement of each bimorph element, and to extract a large quantity of displacement efficiently by connecting a plurality of the bimorph elements without constraining the displacement of the bimorph elements. CONSTITUTION:A first layer rectangular type bimorph element 11 is fixed by a fixture 21 at a central section, and coupled with a second iayer bimorph element 12, the direction of displacement of which is opposed and which is arranged oppositely, by U-shaped leaf springs 31, 32 functioning as electrodes combining shim materials. Each central section is combined by a fixture 22 in the element 12 and a third layer bimorph element 13. Consequently, a member in which the central sections of two bimorph elements are connected and unified mutually by the fixture is used as a fundamental element, the members are laminated at multistages, and maximum displacement sections in the adjacent fundamental elements are coupled mutually by the leaf springs for both-end support sections, thus inhibiting the lowering of the quantities of each element displaced at a time when the bimorph elements are formed in multistage structure. Accordingly, a laminated type piezoelectric displacement element having a large quantity of displacement can be realized.

公开(公告)号：JPH01267492A

公开(公告)日：1989-10-25

申请号：JP9643288

申请日：1988-04-19

Applicant: TOSHIBA CORP

Inventor： ONO TOMIO ,  KONDO TAKESHI ,  EGAWA TETSUYA

IPC: G12B5/00 ,  H01L21/68

Abstract: PURPOSE:To make possible simplification of the whole construction and high speed operation by supporting and driving a plurality of pairs of parallel plate springs composed of piezoelectric displacement elements which have a piezoelectric transverse effect while arranging the parallel plate springs to meet an right angles to each other. CONSTITUTION:A plurality of plate-form piezoelectric elements 201-204 are provided among a rectangular stage 10 for mounting a driving object and bases 301, 302. The plate-form piezoelectric displacement elements 201, 202 form parallel plate springs, the plate-form piezoelectric displacement elements 203, 204 also form the parallel plate springs and these parallel plate springs are arranged to meet at right angles mutually. The plate-form piezoelectric displacement elements 201-202 have a piezoelectric transverse effect and elongate in the direction of meeting an electric field at right angles by applying positive and negative voltage on each electrode 22, 23.