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公开(公告)号：JP2892055B2
公开(公告)日：1999-05-17
申请号：JP29437189
申请日：1989-11-13
Applicant: TOSHIBA KK
Inventor： YAMADA HIROSHI , SAITO MASAYUKI , YAMAMOTO YOSHE , SUDO TOSHIO
IPC: H01L21/60 , H01L21/321 , H01L23/12 , H01L23/29 , H01L23/31
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