公开(公告)号：JP2010168349A

公开(公告)日：2010-08-05

申请号：JP2009269219

申请日：2009-11-26

Applicant: Tosoh Corp ,  東ソー株式会社

Inventor： FURUKAWA YASUSHI ,  OSHIMA KENSHO ,  KONO KAZUHISA ,  CHIBA YOICHI

IPC: C07F17/02 ,  C23C16/18 ,  C23C16/448 ,  H01L21/28 ,  H01L21/285

CPC classification number: C07F17/02 ,  B01J31/2295 ,  C07F15/0046 ,  C23C16/18 ,  H01L28/65

Abstract: PROBLEM TO BE SOLVED: To provide (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium which can be suitably used for producing ruthenium-containing thin film even if containing a compound having a resembling structure, a method for producing the same, a method for producing the ruthenium-containing thin film by using the same, etc.
SOLUTION: This ruthenium-containing thin film is produced by using the (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium containing ≤5 wt.% compound having the resembling structure as a raw material, which is obtained by separating the compound having the resembling structure from the (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium containing the compound having the resembling structure.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 待解决的问题：即使含有具有类似结构的化合物，也可适用于制备含钌薄膜的（2,4-二甲基戊二烯基）（乙基环戊二烯基）钌，其制备方法， 使用该方法制造含钌的薄膜等的方法。解决方案：该含钌的薄膜是通过使用含有≤5重量％的（2,4-二甲基戊二烯基）（乙基环戊二烯基）钌制备的， 通过从具有类似结构的化合物的（2,4-二甲基戊二烯基）（乙基环戊二烯基）钌中分离具有类似结构的化合物而获得的具有类似结构的化合物作为原料。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009046440A

公开(公告)日：2009-03-05

申请号：JP2007215529

申请日：2007-08-22

Applicant: Sagami Chem Res Center ,  Tosoh Corp ,  東ソー株式会社 ,  財団法人相模中央化学研究所

Inventor： FURUKAWA YASUSHI ,  KONO KAZUHISA ,  SEKIMOTO KENICHI ,  OSHIMA KENSHO ,  TADA KENICHI ,  YAMAKAWA SATORU

IPC: C07C15/04 ,  C07C13/23 ,  C07F15/00 ,  C23C16/18 ,  C23C16/40

Abstract: PROBLEM TO BE SOLVED: To provide a new compound having good vaporization characteristics, and being a raw material for producing a metal ruthenium thin film by a CVD method or an ALD method under a condition in a non-oxidizing atmosphere free from an oxidative reactant such as oxygen, to provide a method for producing the compound, a ruthenium-containing thin film produced by using the compound, and a method for producing the thin film.
SOLUTION: The ruthenium-containing thin film is produced by producing the ruthenium compound represented by general formula (1), for example, by the reaction or the like of di-μ-chloro-bis[chloro(η
6 -arene)ruthenium] with 1,3-cyclohexadienes, and using the compound as a raw material. In the formula, R
1 and R
2 are each independently a hydrogen atom or a 1-6C alkyl group; with the proviso that when R
2 is a hydrogen atom, R
1 is not the hydrogen atom or a methyl group.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种具有良好蒸发特性的新化合物，并且是通过CVD法或ALD法在不含氧化气氛的非氧化气氛中的条件下制备金属钌薄膜的原料 氧化反应物如氧气，以提供化合物的制备方法，使用该化合物制备的含钌薄膜及其制造方法。 解决方案：含钌的薄膜通过例如通过二-μ-氯 - 双[氯（η）]的反应等制备由通式（1）表示的钌化合物来制备， 6 - 芳烃）钌]与1,3-环己二烯，并使用该化合物作为原料。 在该式中，R 1和R 2各自独立地为氢原子或1-6C烷基; 条件是当R 2 SP 2是氢原子时，R 1不是氢原子或甲基。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2006070310A

公开(公告)日：2006-03-16

申请号：JP2004253356

申请日：2004-08-31

Applicant: Tokyo Institute Of Technology ,  Tosoh Corp ,  国立大学法人東京工業大学 ,  東ソー株式会社

Inventor： FUNAKUBO HIROSHI ,  SUMI AKIHIRO ,  KOSUGE HIROAKI ,  OSHIMA KENSHO

IPC: C23C16/40 ,  C01G55/00 ,  C30B29/22 ,  H01L21/8246 ,  H01L27/105

Abstract: PROBLEM TO BE SOLVED: To provide a thin film of metal oxide based on strontium iridium oxide (SrIrO
3 ), in particular, perovskite type SrIrO
3 .
SOLUTION: The method for manufacturing a thin film of metal oxide based on SrIrO
3 , in particular, SrIrO
3 of the perovskite type structure on a surface of a base material 3, in particular, on a surface of the base material 3 forming (1 0 0) face or (1 1 0) face of cubic system, tetragonal system, rhombic system by an organic metal chemical vapor deposition method using raw material gas containing organic strontium (Sr) compound 11 and organic iridium (Ir) compound 12, is provided.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种基于氧化锶锶（SrIrO 3 SBS）的金属氧化物薄膜，特别是钙钛矿型SrIrO 3 SBB。 解决方案：在碱的表面上制备基于SrIrO 3 SBS的金属氧化物薄膜的方法，特别是钙钛矿型结构的SrIrO 3 SB 3 / SB 材料3，特别是在通过有机金属化学气相沉积法形成（10 0）面或（110）面的立方体系的四面体系，菱形体的基材3的表面上，使用含有 有机锶（Sr）化合物11和有机铱（Ir）化合物12。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005132756A

公开(公告)日：2005-05-26

申请号：JP2003368973

申请日：2003-10-29

Applicant: Sagami Chem Res Center ,  Tosoh Corp ,  東ソー株式会社 ,  財団法人相模中央化学研究所

Inventor： SEKIMOTO KENICHI ,  OSHIMA KENSHO ,  YAMAKAWA SATORU ,  TADA KENICHI

IPC: C07F17/00 ,  C07F9/00 ,  C23C16/34 ,  H01L21/285

Abstract: PROBLEM TO BE SOLVED: To obtain a tantalum compound that has reactivity to water lower than that of a conventional tantalum compound and forms a tantalum-containing thin film by a CVD method and to provide a method for producing the same and a method for forming a tantalum-containing thin film using the compound.
SOLUTION: The tantalum compound represented by formula 1 (R
1 is a 1-3C alkyl; R
2 is a 1-5C alkyl or a 3C or 4C trialkylsilyl; R
3 is a 1-3C alkyl; R
4 is methyl or ethyl; m is an integer of 0-5; n is an integer of 0-3; m+n is a number of ≤5) is obtained by reacting a tantalum compound represented by formula 2 with a cyclopentadiene derivative represented by general formula 3. The tantalum-containing thin film is obtained by using the compound as a raw material.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了获得与常规钽化合物具有低于水的反应性的钽化合物并通过CVD法形成含钽薄膜并提供其制造方法和方法 用于使用该化合物形成含钽薄膜。 解决方案：由式1表示的钽化合物（R 1 是1-3C烷基; R 2 SP 2是1-5C烷基或3C或4C三烷基甲硅烷基 R 3是1-3C烷基; R 4是甲基或乙基; m是0-5的整数; n是0-3的整数; m + n是≤5的数）是通过使由式2表示的钽化合物与由通式3表示的环戊二烯衍生物反应而获得的。含钽薄膜是通过使用该化合物作为原料而获得的。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003300993A

公开(公告)日：2003-10-21

申请号：JP2002103672

申请日：2002-04-05

Applicant: Tosoh Corp ,  東ソー株式会社

Inventor： FURUKAWA YASUSHI ,  OSHIMA KENSHO ,  SEKIMOTO KENICHI

IPC: B01J31/20 ,  C07F15/00

Abstract: PROBLEM TO BE SOLVED: To provide a stable zero-valent ruthenium complex produceable in a mild condition, and expected as a catalyst for reduction, organic synthesis and organic polymerization, and to provide a method for producing the complex.
SOLUTION: The zero-valent ruthenium complex represented by formula 1: RuL
1 L
2 (CO) 1 [wherein, L
1 is a linear diene; and L
2 is a linear diene or a cyclic diene] (with the proviso that the compound in which L
1 and L
2 are the same is omitted) is obtained by reacting a ruthenium complex represented by formula 3: RuL
1
2 (CO) 3 [wherein, L
1 is a linear diene] with L
2 [L
2 is a linear diene or a cyclic diene, with the proviso that L
1 and L
2 are not the same] in an organic solvent to exchange one of the ligand L
1 of the complex represented by formula 3 with L
2 .
COPYRIGHT: (C)2004,JPO

Abstract translation: 待解决的问题：提供在温和条件下可产生的稳定的零价钌络合物，并且作为还原，有机合成和有机聚合的催化剂，并提供一种生产该络合物的方法。 解决方案：由式1表示的零价钌络合物：RuL 1 2（CO）1 [其中，L 1 是线性二烯烃; 并且L 2 是线性二烯烃或环状二烯烃（条件是其中L 1 和L 2 的化合物是相同的 通过使由式3表示的钌络合物：RuL 1 2（CO）3 [其中，L 1 线性二烯]与L 2 [L SP＆gt; 2 是线性二烯或环状二烯，条件是L 1 和L 2 不相同]在有机溶剂中将由式3表示的络合物的配体L 1 中的一个与L 2 进行交换。 版权所有（C）2004，JPO

公开(公告)号：JP2003300992A

公开(公告)日：2003-10-21

申请号：JP2002103671

申请日：2002-04-05

Applicant: Tosoh Corp ,  東ソー株式会社

Inventor： FURUKAWA YASUSHI ,  OSHIMA KENSHO ,  SEKIMOTO KENICHI

IPC: C07F15/00 ,  C07F9/50 ,  C07F17/02

Abstract: PROBLEM TO BE SOLVED: To provide a ruthenium complex expected as a catalyst for organic synthesis and organic polymerization, and to provide a method for producing the complex.
SOLUTION: The zero-valent ruthenium complex represented by formula 1: RuL
1 L
2 A(CO) [wherein, L
1 is a linear diene; L
2 is a phosphine or a diphosphine; and A is 2 when L
2 is the phosphine, and A is 1 when L
2 is the diphosphine] is produced by reacting a ruthenium complex represented by formula 5: RuL
1
2 (CO) [wherein, L
1 is the same as the above] with AL
2 [wherein L
2 and A are the same as the above] in an organic solvent to exchange one of the ligand L
1 of the complex represented by formula 5 with L
2 .
COPYRIGHT: (C)2004,JPO

Abstract translation: 待解决的问题：提供预期作为有机合成和有机聚合的催化剂的钌络合物，并提供一种复合物的制备方法。 解决方案：由式1表示的零价钌络合物：RuL 1（CO）[其中，L 1 是线性二烯烃; L 2 是膦或二膦; 当L 2 是膦时，A为2，当L 2时为A为二膦]是通过使式5表示的钌络合物：RuL < SP> 1 2（CO）[其中，L 1 与上述相同]，其中L 2 和A与上述相同]在有机溶剂中以将式5表示的络合物的配体L 1 与L 2 < / SP>。 版权所有（C）2004，JPO

公开(公告)号：JP2001351271A

公开(公告)日：2001-12-21

申请号：JP2000174217

申请日：2000-06-06

Applicant: TOSOH CORP

Inventor： ONO HIDEKI ,  OSHIMA KENSHO ,  NISHIZAWA KEIICHIRO

IPC: G11B7/24 ,  G11B7/007

Abstract: PROBLEM TO BE SOLVED: To provide an optical recording medium, having high reliability, in which uniform signal recording and reproduction are obtained and crashing between the medium and an optical head hardly occurs. SOLUTION: The optical recording medium has a reflecting layer and a recording layer, laminated in this order on a substrate, having a header and lands/grooves and is used for recording and reproduction with a floating type optical head. When the effective numerical aperture of the optical head to be used is NA, the wavelength of the laser light to be used is λ, the depth from the surface of the medium at the maximum height to the center line of the header is Rph, and the depth from the surface at the maximum height to the center line of the lands/grooves is Rpd in any length along the radius in the recording and reproducing region, a relation of, for example, |Rpd (maximum)-Rph (minimum)|

公开(公告)号：JP2001236701A

公开(公告)日：2001-08-31

申请号：JP2000045107

申请日：2000-02-17

Applicant: TOSOH CORP

Inventor： ONO HIDEKI ,  OSHIMA KENSHO ,  NISHIZAWA KEIICHIRO

IPC: G11B11/105

Abstract: PROBLEM TO BE SOLVED: To provide a near-field magneto-optical recording medium which maintains high surface cleanliness by preventing adhesion of foreign matter generated in a recording and reproducing region due to repetitive use and has high durability and reliability. SOLUTION: In the magneto-optical recording medium which is constituted by laminating at least a reflecting layer, a recording layer, a dielectrics layer and a solid lubricating layer on a substrate in this order, has a hub for rotating the substrate at a central part of the substrate and executes recording and reproducing by a floating head, a groove is formed in at least one among an outer region than the recording and reproducing region and the region being an outside of a hub attaching region and an inside of the recording and reproducing region on the substrate surface.

公开(公告)号：JP2001236699A

公开(公告)日：2001-08-31

申请号：JP2000045106

申请日：2000-02-17

Applicant: TOSOH CORP

Inventor： ONO HIDEKI ,  OSHIMA KENSHO ,  NISHIZAWA KEIICHIRO

IPC: G11B11/105

Abstract: PROBLEM TO BE SOLVED: To provide a near field magneto-optical recording medium having high durability and reliability in which fracture in a recording and reproducing thin film in the recording and reproducing region due to impact added to the recording medium is prevented. SOLUTION: In the magneto-optical recording medium having at least a reflection layer, recovering layer, dielectric layer and solid lubricant layer successively formed in this order on a substrate to perform recording and reproducing by using a floating type head, at least one layer of the thin films formed on the substrate has a notch formed in the region outside of the recording and reproducing region.

公开(公告)号：JP2001229586A

公开(公告)日：2001-08-24

申请号：JP2000035655

申请日：2000-02-08

Applicant: TOSOH CORP

Inventor： ONO HIDEKI ,  OSHIMA KENSHO ,  NISHIZAWA KEIICHIRO

IPC: G11B11/105

Abstract: PROBLEM TO BE SOLVED: To provide a near-field magneto-optical recording medium excellent in durability and reliability, which keeps the floating stability of a head floating above the near-field magneto-optical medium and in which recording and reproducing signals with little noise can be obtained. SOLUTION: In the near-field magneto-optical recording medium produced by successively forming at least a reflection layer, a recording layer, a dielectric layer and a solid lubricant layer in this order on a substrate and to be used for recording and reproducing with a floating head, the center line average roughness Ra of the land and/or groove formed in the recording medium is controlled to the range of 0.2 nm