公开(公告)号：EP3295116A1

公开(公告)日：2018-03-21

申请号：EP16796908

申请日：2016-04-28

Applicant: TRUTAG TECH INC

Inventor： ETCHIN SERGEY ,  FINKELSTEIN HOD

IPC: G01B9/02 ,  G01B9/00 ,  G01J3/00 ,  G01J3/26

CPC classification number: G01J3/45 ,  G01B7/14 ,  G01J3/26 ,  G02B26/001

Abstract: A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.