Abstract:
An integrated device including a photodetector, a transparent substrate, and one or more spacers. The photodetector is formed in a portion of a wafer. The one or more spacers separate the photodetector and the transparent substrate.
Abstract:
A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.