公开(公告)号：WO1993007613A2

公开(公告)日：1993-04-15

申请号：PCT/US1992008314

申请日：1992-09-30

Applicant: TULIP MEMORY SYSTEMS, INC.

Inventor： TULIP MEMORY SYSTEMS, INC. ,  WEIR, Richard, D. ,  NELSON, Carl, W.

IPC: G11B05/64

CPC classification number: G11B5/7325 ,  G11B5/738 ,  G11B5/8404 ,  Y10S428/90 ,  Y10T428/12458 ,  Y10T428/12465 ,  Y10T428/12743 ,  Y10T428/265 ,  Y10T428/31678

Abstract: A coated metal-substrate disk for magnetic-recording applications is disclosed having a first coating selected from the group consisting of nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten, or the group consisting of aluminum nitride, silicon nitride, or silicon carbide on the metal substrate and a magnetic-recording material coating on the first coating. The first coatings are applied by evaporative reactive ion plating or by reactive sputtering.

Abstract translation: 公开了一种用于磁记录应用的涂覆金属基材盘，其具有选自钛，锆，铪，钒，铌，钽，铬，钼或钨的氮化物，碳化物或硼化物的第一涂层，或 在金属基板上由氮化铝，氮化硅或碳化硅组成的组以及在第一涂层上涂覆的磁记录材料。 通过蒸发反应离子镀或反应溅射法涂覆第一层涂层。

公开(公告)号：WO1993018539A1

公开(公告)日：1993-09-16

申请号：PCT/US1993002014

申请日：1993-03-04

Applicant: TULIP MEMORY SYSTEMS, INC.

Inventor： TULIP MEMORY SYSTEMS, INC. ,  NELSON, Carl, W. ,  WEIR, Richard, D.

IPC: H01J37/34

CPC classification number: C23C14/345 ,  C23C14/357 ,  H01J37/32192 ,  H01J37/3222 ,  H01J37/32623 ,  H01J37/32678 ,  H01J37/32688 ,  H01J37/34 ,  H01J37/3402

Abstract: Disclosed is a sputtering apparatus and method for deposition of a thin film on a substrate with means for exciting a plasma by ultrahigh radio frequency or microwave at the electron cyclotron resonance to create a region of plasma which is devoid of magnetic field and at least one high-radio frequency planar disk diode positioned within the region devoid of magnetic field, a target attached to said rf planar diode, and a high-radio frequency substrate biasing electrode parallel to the planar diode.

公开(公告)号：WO1993021629A1

公开(公告)日：1993-10-28

申请号：PCT/US1993003554

申请日：1993-04-14

Applicant: TULIP MEMORY SYSTEMS, INC.

Inventor： TULIP MEMORY SYSTEMS, INC. ,  WEIR, Richard, D. ,  NELSON, Carl, W. ,  HEIMAN, Neil, D.

IPC: G11B05/82

CPC classification number: G11B5/7325 ,  G11B5/82 ,  G11B5/8404 ,  Y10S428/90 ,  Y10T428/265

Abstract: A magnetic-recording disk (100) comprising a metal substrate disk having a textured annular first surface area (103) with an outer diameter which is substantially less than the diameter of the metal substrate is disclosed herein. The metal substrate disk further has a smooth annular second surface area (104) between the first surface area's outer diameter and the metal substrate's circumferential edge. The textured annular first surface area (103) has a laser-etched circular pattern. Furthermore the metal disk substrate of an aluminum alloy, a titanium alloy, or an austenitic stainless steel has a thin-film coating selected from the group consisting of nitrides, carbides, or borides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum or tungsten.

Abstract translation: 本文公开了一种磁记录盘（100），其包括具有纹理的环形第一表面区域（103）的金属基板盘，其外径基本上小于金属基板的直径。 金属基板盘在第一表面区域的外径和金属基板的周向边缘之间还具有平滑的环形第二表面区域（104）。 纹理化的环形第一表面区域（103）具有激光蚀刻的圆形图案。 此外，铝合金，钛合金或奥氏体不锈钢的金属盘基板具有选自钛，锆，铪，钒，铌，钽等的氮化物，碳化物或硼化物的薄膜涂层， 铬，钼或钨。