公开(公告)号：US20210198097A1

公开(公告)日：2021-07-01

申请号：US17192127

申请日：2021-03-04

Applicant: The University of Manchester

Inventor： Aravind Vijayaraghavan ,  Christian Berger

IPC: B81B3/00 ,  B81C1/00 ,  B32B3/30 ,  B32B27/06

Abstract: There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a transparent substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.

公开(公告)号：US11180367B2

公开(公告)日：2021-11-23

申请号：US16498596

申请日：2018-03-21

Applicant: THE UNIVERSITY OF MANCHESTER

Inventor： Aravind Vijayaraghavan ,  Christian Berger

IPC: B81C1/00 ,  B81B3/00 ,  G01L9/00

Abstract: A method of transferring a two-dimensional material such as graphene onto a target substrate for use in the fabrication of micro- and nano-electromechanical systems (MEMS and NEMS). The method includes providing the two-dimensional material in a first lower state of strain; and applying the two-dimensional material onto the target substrate whilst the two-dimensional material is under a second higher state of strain. A device comprising a strained two-dimensional material suspended over a cavity.

公开(公告)号：US10947107B2

公开(公告)日：2021-03-16

申请号：US15772983

申请日：2016-11-04

Applicant: The University of Manchester

Inventor： Aravind Vijayaraghavan ,  Christian Berger

IPC: B81B3/00 ,  B81C1/00 ,  H01H1/00 ,  H01L29/16

Abstract: There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.

公开(公告)号：US20180327252A1

公开(公告)日：2018-11-15

申请号：US15772983

申请日：2016-11-04

Applicant: The University of Manchester

Inventor： Aravind Vijayaraghavan ,  Christian Berger

IPC: B81B3/00 ,  B81C1/00 ,  H01L29/16 ,  H01H1/00

CPC classification number: B81B3/007 ,  B81B2201/02 ,  B81B2203/04 ,  B81C1/00158 ,  H01H1/0094 ,  H01L29/1606 ,  H04R2307/023

Abstract: There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.