公开(公告)号：JPH03175371A

公开(公告)日：1991-07-30

申请号：JP31415089

申请日：1989-12-05

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI ,  NAGUMO SHOICHI

IPC: G01R27/02 ,  G01R31/02

Abstract: PURPOSE:To measure leakage resistance between lines with high accuracy by taking the difference between the measured parallel value and measured series value in the same resistor at every line with respect to each of a plurality of line resistors arranged in a zigzag pattern. CONSTITUTION:When switches S0, S13 are closed and the remaining switches are opened, the currents flowing through all of line resistors RS can be collectively measured. When there is no irregularity between the resistors RS, the readings of respective ammeters M become equal excepting a terminal wherein there is leakage between adjacent lines and, therefore, it is cleared what part between terminals there is leakage. Next, when switches S0, S2, S4... S10, S12, 813 are opened and the remaining switches are closed, the currents flowing through the resistors RS on the side of terminals T2, T4... T10 are detected. The switches S0, S1, S3... S11, S13 are opened and the remaining switches are closed, the currents flowing through the resistors RS on the side of terminals T1, T3... T9 are detected. AS mentioned above, by taking the difference between the measured parallel and series values in the same resistor at every line, the error due to the irregularity of resistance values is set off and the leakage resistance between lines can be measured with high accuracy.

公开(公告)号：JPH01318974A

公开(公告)日：1989-12-25

申请号：JP15309688

申请日：1988-06-20

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI ,  UEI SHUNICHI ,  UENO ATSUO

IPC: G01R27/02

Abstract: PURPOSE:To prevent transition current when specimen incorporates a capacitive component and to perform measurement even if the specimen includes a short- circuiting element without trouble, by supplying preparation current under the state wherein ammeters are bypassed in starting measurement. CONSTITUTION:When a capacitive component is included in a specimen X, transition current flows through ammeters I. It takes a long time to attain a balanced state. Therefore, during the preparation period at the beginning of the measurement, a first switch S11 in a resistance measuring circuit I1 and a second switch S21 in a resistance measuring circuit I1 are both turned ON. The current is supplied to the specimen X without through the ammeters I1a and I1b. In this way, a time until a steady state is achieved is shortened. When the specimen is a short-circuiting element, the current through a current limiting circuit IL1 is increased, but a constant voltage element VL1 becomes ON. Since the terminal voltage of a power source is kept at a constant value, measurement can be performed without trouble.

公开(公告)号：JPH07104712A

公开(公告)日：1995-04-21

申请号：JP25310393

申请日：1993-10-08

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: G01R31/00 ,  G02F1/13 ,  G02F1/136 ,  G02F1/1368 ,  G09G3/36

Abstract: PURPOSE:To provide an inspection device capable of exactly and easily detecting the various kinds of defects an active matrix array in non-contact state from a color image of the coloring/decoloring of a voltage sensitive dye. CONSTITUTION:In order to make thin film transistors T11-T3n, T31-T3n,... conducted and to charge accumulative capacitor elements C11-C1n, C31-C3n, by immersing an active matrix array in a solution containing a voltage sensitive dye and impressing a bias voltage Vg on a short bus SBG1, an AC voltage Vsig is impressed on a short bus SBG2. A color image on the circuit pattern forming surface of the array obtained as a result is pickuped by means of a color pickup means, taken up and stored as the change of an electric signal, the stored data and expected value pattern obtained from a non-defective substrate are superposed and compared for every pixel, the potential of the defect generating part is discriminated and the portion of defect is detected. Then, by impressing the AC voltage Vsig on the short bus SBG1 and the bias voltage Vg on the short bus SBG2, respectively, the similar inspection is performed.

公开(公告)号：JPH0519950B2

公开(公告)日：1993-03-18

申请号：JP18030985

申请日：1985-08-16

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: G01R27/08

公开(公告)号：JPH056670B2

公开(公告)日：1993-01-27

申请号：JP23576784

申请日：1984-11-07

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: G01R19/145 ,  G01R27/02

公开(公告)号：JPH0764517A

公开(公告)日：1995-03-10

申请号：JP21570893

申请日：1993-08-31

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: G02F1/13 ,  G02F1/136 ,  G02F1/1368 ,  G09G3/36

Abstract: PURPOSE:To provide an active matrix array inspection device capable of precisely and easily detecting a defect of an active matrix array where a signal line is short-circuited by a short bus without contacting and accurately specifying a defect detection position also. CONSTITUTION:The short buses of the data signal lines S1, S2, Sn are set at ground potential, and high frequency signals with different frequencies from signal sources OSC1, OSC2, OSCn are supplied to their take-out terminals PS1, PS2, PSn respectively. On the other hand, a bias voltage is applied to a gate signal line of immediately before stage of the gate signal line g2, and a thin film field effect transistor is conducted, and output signals from respective data signal lines are detected from the take-out terminal Pg2 of the gate signal line g2, and after they are amplified by an amplifier AMP, the high frequency signals with the frequencies corresponding to the frequencies of respective signal sources are selected and detected by detection amplifiers F1, F2, Fn respectively. After these detection outputs are summed up by the whole pixels, the defect of the array is discriminated, e.g. by software processing.

公开(公告)号：JPS61288603A

公开(公告)日：1986-12-18

申请号：JP13135585

申请日：1985-06-17

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: H03B21/00

Abstract: PURPOSE:To eliminate waveform distortion due to glitch by latching alternately an output of a digital waveform generator, converting separately an analog signal, eliminating a part having a glitch, selecting alternately the analog signal and synthesizing the signals. CONSTITUTION:Digital values D0, D1 ... of each step of a stepwise triangle wave from a digital waveform generator 1 are given to latch circuits 11a, 11b synchronously with the leading of a basic clock CK0. The clock CK0 is given to the clock generating circuit to give clocks CK1, CK2 to the latch circuits 11a, 11b. The latch circuit 11a (11b) fetches digital data D1, D3 (D0, D2) given to the input synchronously with the leading of the clock CK1 (CK2), latches them until the next clock and the data is given to a DA converter 2a (2b). Then the outputs of the converters 2a, 2b are extracted alternately by each basic clock period and synthesized while shifting the latch point of the latch circuit and the result is outputted as an analog signal having a frequency to be synthesized.

公开(公告)号：JPS5187947A

公开(公告)日：1976-07-31

申请号：JP1192875

申请日：1975-01-30

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI ,  AMAMOTO HIDEKI

IPC: H03K4/02 ,  H03K5/00 ,  H03L7/00

公开(公告)号：JPS5162765A

公开(公告)日：1976-05-31

申请号：JP13616874

申请日：1974-11-29

Applicant: Toa Electronics

Inventor： SHIMADA KOICHI

IPC: G01R23/16

公开(公告)号：JPS6239774A

公开(公告)日：1987-02-20

申请号：JP18030985

申请日：1985-08-16

Applicant: TOA ELECTRONICS

Inventor： SHIMADA KOICHI

IPC: G01R27/08

Abstract: PURPOSE:To make it possible to measure a high resistance body connected to first and second switches, by connecting a plurality of series circuits of first and second switches comprising a semiconductor in parallel and further connecting said circuits to both terminals of a constant voltage source through a current detecting resistor. CONSTITUTION:At the time of the measurement of high resistance, a high voltage resistant diode 39 is connected to a current supply transistor Tr 26 in series so as to withstand the high voltage of a constant voltage source 13. A current detecting Tr 28 is also formed of a high voltage resistant element and, in order to bring the leak current to a Tr driving circuit to zero, photoresistors are used as Tr 26, 28 and connected to the driving circuit by a photocoupler. At the time of measurement, switch 34, 35, 33 are turned ON and a switch 31 is turned OFF. In this state, the supply voltage of the constant voltage source 13 is monitored from the output of an amplifier 37 and, for example, the minute current flowing to the high resistance body to be measured connected to measuring terminals 31, 32 is detected on the basis of the output of an amplifier 16 or 38 and the resistance value of the high resistance body is measured.