公开(公告)号：US20180047563A1

公开(公告)日：2018-02-15

申请号：US15675385

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Rodney L. Robison ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, JR. ,  David Hetzer ,  Lior Huli ,  Joshua S. Hooge

IPC: H01L21/027 ,  H01L21/02 ,  H01L21/66 ,  H01L21/67

CPC classification number: H01L21/0275 ,  B05C5/02 ,  B05C11/1007 ,  B05C11/1047 ,  H01L21/02118 ,  H01L21/67017 ,  H01L21/67023 ,  H01L21/6715 ,  H01L21/67253 ,  H01L22/12

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.

公开(公告)号：US10712663B2

公开(公告)日：2020-07-14

申请号：US15675376

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, Jr.

IPC: G03F7/16 ,  B05B9/04 ,  B05B9/047 ,  B05C11/10 ,  H01L21/027 ,  H01L21/66 ,  G03F7/30 ,  B05B9/08

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A modular hydraulic unit houses the elongate bladder and hydraulic fluid in contact with an exterior surface of the bladder. When pressurized process fluid is in the elongate bladder, hydraulic controls can selectively reduce pressure on the bladder to cause expansion, and then selectively increase hydraulic pressure to assist with a dispense action.

公开(公告)号：US10354872B2

公开(公告)日：2019-07-16

申请号：US15675385

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Rodney L. Robison ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, Jr. ,  David Hetzer ,  Lior Huli ,  Joshua S. Hooge

IPC: B05C11/10 ,  H01L21/027 ,  H01L21/02 ,  H01L21/67 ,  H01L21/66 ,  B05C5/02

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.

公开(公告)号：US20180047562A1

公开(公告)日：2018-02-15

申请号：US15675383

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Rodney L. Robison ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, JR. ,  Lior Huli ,  Joshua S. Hooge

IPC: H01L21/027 ,  H01L21/02 ,  H01L21/67

CPC classification number: H01L21/0275 ,  B05B15/557 ,  B05C5/02 ,  B05C11/1007 ,  B05C11/1047 ,  H01L21/02118 ,  H01L21/67017 ,  H01L21/67023 ,  H01L21/6715

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A process fluid filter is located downstream from a process fluid source as well as a system valve. Downstream from the process fluid filter there are no valves. Dispense actions can be initiated and stop while the system valve is open by using the elongate bladder. The elongate bladder can be expanded to stop or pause a dispense action, and then be contracted to assist with a dispense action.

公开(公告)号：US10403501B2

公开(公告)日：2019-09-03

申请号：US15675383

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Rodney L. Robison ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, Jr. ,  Lior Huli ,  Joshua S. Hooge

IPC: B05C11/10 ,  H01L21/02 ,  H01L21/027 ,  B05B15/55 ,  H01L21/67 ,  B05C5/02

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A process fluid filter is located downstream from a process fluid source as well as a system valve. Downstream from the process fluid filter there are no valves. Dispense actions can be initiated and stop while the system valve is open by using the elongate bladder. The elongate bladder can be expanded to stop or pause a dispense action, and then be contracted to assist with a dispense action.

公开(公告)号：US20180046082A1

公开(公告)日：2018-02-15

申请号：US15675376

申请日：2017-08-11

Applicant: Tokyo Electron Limited

Inventor： Anton J. deVilliers ,  Ronald Nasman ,  David Travis ,  James Grootegoed ,  Norman A. Jacobson, JR.

IPC: G03F7/16 ,  H01L21/027 ,  H01L21/66

Abstract: Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A modular hydraulic unit houses the elongate bladder and hydraulic fluid in contact with an exterior surface of the bladder. When pressurized process fluid is in the elongate bladder, hydraulic controls can selectively reduce pressure on the bladder to cause expansion, and then selectively increase hydraulic pressure to assist with a dispense action.