公开(公告)号：JPH11307447A

公开(公告)日：1999-11-05

申请号：JP14873298

申请日：1998-05-29

Applicant: UNITED MICROELECTRONICS CORP

Inventor： KYU SHIKUN ,  RI RITSUCHU ,  KO ISEI ,  TEI EIMEI

IPC: G03F7/22 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a coolant container which prevents leakage of coolant. SOLUTION: The coolant container has a storage container 30 for storing coolant, a tubular projection on a top part of the storage container 30 which runs along a central line thereof to form an inlet for coolant and has a hollow part passing through the storage container 30 and a screw.cap 32 having a male screw thread which engages with a male screw thread of the tube for closing the coolant inlet airtightly in an inner circumferential part. The container is a closed system except a coolant inlet, a circulation output duct and a circulation input duct. Consequently, it is possible to eliminate a fault regarding airtightness of a conventional coolant container and to prevent leakage of coolant. As a result, it is possible to prevent shortage of an amount of coolant of a stepper which generates various problems in a stepper and breaks a stepper.