公开(公告)号：JP2001131783A

公开(公告)日：2001-05-15

申请号：JP30857199

申请日：1999-10-29

Applicant: UNITED MICROELECTRONICS CORP

Inventor： SHO HEICHU ,  RO SORIN ,  SHO ENZAN ,  CHIN SHIKEN ,  CHIN OGI ,  YO SEIGEN ,  CHIN KENHO

IPC: B08B3/08 ,  C23G1/24

Abstract: PROBLEM TO BE SOLVED: To increase effective working time on a work-table while securing sufficient success probability of P.M.(preventive maintenance) by performing cleaning work of deposited matter on a pipe without consuming so much manpower and in such a way that the worker's health is not adversely affected. SOLUTION: This cleaning method for removing deposited matter on a stainless steel pipe with a fluorine-containing neutral solution comprises: (1) a step for providing a vessel into which the fluorine-containing neutral solution is charged; (2) a step for placing plural such stainless steel pipes on each of which the deposited matter exists, in the vessel and immersing the stainless pipes in the fluorine-containing neutral solution; and (3) a step for heating the contents of the vessel, to raise the temperature, to allow the fluorine-containing neutral solution to flow through the space between every adjacent two of the stainless steel pipes and to improve removal efficiency of the deposited matter.