公开(公告)号：CA1220048A

公开(公告)日：1987-04-07

申请号：CA459286

申请日：1984-07-19

Applicant: UNITED TECHNOLOGIES CORP

Inventor： MELTZ GERALD ,  ALLEN LOUIS B JR ,  FERRAR CARL M

IPC: G01L11/00 ,  G01L1/24 ,  G01L9/00 ,  G01L11/02

Abstract: Temperature Compensated Optical Pressure Sensor An integrated optical pressure transducer having a diaphragm fabricated from a low-loss glass is positioned at the location where pressure changes are to be measured. An optical waveguide loop formed on one surface of the diaphragm acts as a ring cavity in which the difference between the resonating frequencies varies with pressure but not with temperature. Light energy is coupled into the waveguide loop from an optical source through a tangentially located input waveguide. An output waveguide, also tangentially located, couples light energy from the waveguide loop to a broadband detector so that the changes in frequency spectrum of the resonating frequencies within the waveguide loop can be monitored.