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    METHOD FOR PRODUCING DIAMOND-LIKE CARBON LAYERS
    6.
    发明申请
    METHOD FOR PRODUCING DIAMOND-LIKE CARBON LAYERS 审中-公开
    生产金刚石碳层的方法

    公开(公告)号：WO9512693A2

    公开(公告)日：1995-05-11

    申请号：PCT/US9412064

    申请日：1994-10-20

    Applicant: UNITED TECHNOLOGIES CORP

    Inventor： COOPER CLARK V ,  ISABELLE CHARLES J

    IPC: C23C14/06 ,  C23C14/22 ,  F16C33/00 ,  F16H1/00

    CPC classification number: F16C33/00 ,  C23C14/0605 ,  C23C14/221

    Abstract: One broad-beam ion deposition coating method (10) for depositing diamond-like-carbon (DLC) coatings on the dynamic surfaces of articles subject to adherence difficulties includes the steps of: (12) preliminarily conditioning the dynamic surface for broad-beam ion deposition; (14) inserting the article in a deposition chamber; (16) evacuating the deposition chamber to a predetermined base pressure; (18) ion sputtering conditioning of the dynamic surface by ionizing an inert gas to form an ion beam having a predetermined beam current density and accelerating energy and directing the ion beam onto the dynamic surface; (20) depositing an interface layer on the dynamic surface by ionizing a first gas to form an ion beam having a predetermined beam current density and accelerating energy, and directing the ion beam onto a target to dislodge atoms therefrom, the dislodged atoms depositing on the dynamic surface to form the interface layer; and (22) depositing a DLC coating on the interface layer by ionizing a carbon-base gas to form base gas to form an ion beam having a predetermined beam current density and accelerating energy and directing the ion beam for deposition of carbon ions onto the interface layer to form the DLC coating thereon. Another broad-beam ion deposition coating method (10') is used to deposit DLC coatings on the dynamic surfaces of articles not subject to adherence difficulties and includes steps (12, 14, 16, 18, and 22) as described hereinabove. The broad beam ion deposition coating methods (10, 10') have utility for depositing DLC coatings on the inner and outer raceways and/or bearing elements of a bearing assembly, the faces of the gear teeth of at least one of the intermeshing gears of a gear train, and the flank and land surfaces of the annular microstructures of a rolling die utilized to form detailed heat transfer surfaces in a copper sheeting workpiece which is subsequently utilized to fabricate heat exchanger tubing for air conditioners.

    Abstract translation: 用于在具有粘附困难的制品的动态表面上沉积类金刚石（DLC）涂层的一种宽束离子沉积涂覆方法（10）包括以下步骤：（12）预先调节宽束离子的动态表面 沉积; （14）将物品插入沉积室中; （16）将沉积室抽空至预定的基础压力; （18）通过电离惰性气体来离子溅射调节动态表面以形成具有预定束流密度并加速能量并将离子束引导到动态表面上的离子束; （20）通过电离第一气体以形成具有预定的束电流密度和加速能量的离子束，并将离子束引导到目标上以从其上移除原子，将动态表面上的界面层沉积在动态表面上， 动态表面形成界面层; 和（22）通过电离碳基气体形成基础气体来形成界面层上的DLC涂层，以形成具有预定的束电流密度和加速能量的离子束，并引导离子束将碳离子沉积到界面上 层以在其上形成DLC涂层。 使用另一种宽束离子沉积涂覆方法（10'）将DLC涂层沉积在不受粘附困难的制品的动态表面上，并且包括如上所述的步骤（12,14,16,18和22）。 宽束离子沉积涂覆方法（10,10'）可用于在轴承组件的内滚道和外滚道和/或轴承元件上沉积DLC涂层，其中至少一个啮合齿轮的齿轮齿的面 齿轮系，以及用于在铜片材工件中形成详细传热表面的轧制模具的环形微结构的侧面和表面，其随后用于制造用于空调的热交换器管道。

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