Abstract:
There is disclosed a piezoelectric droplet maker that is driven at high frequency and energized with high power and high frequency Operational Amplifier (OP-AMP) electronics. The droplet maker implements a method of producing jets of uniform droplets of solution precursors (or any other homogeneous liquids). The formation of droplets results from stream break up due to the disturbance of liquid jets by the piezo actuator as they leave an orifice. This disturbance can be electronically tuned to produce uniform droplets with high repeatability. In another aspect, the droplet maker can be used to inject axially uniform diameter solution precursor droplets into process gas flow of a microwave plasma apparatus.
Abstract:
Un sistema (10) para producir flujos de gotitas (38) que tienen gotitas de diámetro uniforme, comprendiendo el sistema (10): un dispensador de solución (20) y una porción generadora de gotitas (30), comprendiendo la porción generadora de gotitas (30) tres niveles, un nivel de carcasa piezoeléctrica (210), un nivel de recipiente de depósito (230) y un nivel de portaboquillas (250); el dispensador de solución (20) está en comunicación fluida con un depósito de fluido (35) en un recipiente de depósito de fluido (37) del nivel de recipiente de depósito (230); una membrana de separación (220) que forma parte del nivel de carcasa piezoeléctrica (210), el depósito de fluido (35) adyacente y en contacto con un lado de la membrana de separación (220); el nivel de carcasa piezoeléctrica (210) tiene un dispositivo de retención (212) que incluye un tubo de acero (215) y una tapa roscada (216), un perno giratorio (218), que se enrosca en la tapa roscada (216), aplica presión en un actuador piezoeléctrico (34) para que entre en contacto con la membrana de separación (220) en un lado opuesto al que está en contacto con el depósito de fluido (35), el accionador piezoeléctrico (34) produce oscilaciones que se comunican a la membrana de separación (220) entre el nivel de carcasa piezoeléctrica (210) y el recipiente de depósito (37); y una o más boquillas capilares (36) dispuestas alejadas de la membrana de separación (220), en donde la una o más boquillas capilares (36) reciben fluido del depósito de fluido (35) y expulsan un flujo de gotitas (38) desde la boquilla capilar (36).
Abstract:
Systems, methods, and devices are disclosed for producing substantially uniform droplets. The system includes a fluid reservoir vessel defining a fluid reservoir, a separation membrane at one end of the fluid reservoir, at least one capillary channel at an opposite end of the fluid reservoir, a solution dispenser, and a piezo actuator in contact with a separation membrane. The separation membrane has a thickness greater than about 0.2 mm, and the solution dispenser maintains the fluid reservoir filled with fluid such that the fluid simultaneously contacts the separation membrane and the capillary channel. The solution dispenser maintains the fluid reservoir under pressure to create a fluid stream exiting the capillary. The piezo actuator is in contact with the separation membrane on a side opposite that in contact with the fluid, and the piezo actuator transfers a pressure wave through the fluid in the fluid reservoir to break up the fluid stream into uniform droplets.
Abstract:
There is disclosed a piezoelectric droplet maker that is driven at high frequency and energized with high power and high frequency Operational Amplifier (OP-AMP) electronics. The droplet maker implements a method of producing jets of uniform droplets of solution precursors (or any other homogeneous liquids). The formation of droplets results from stream break up due to the disturbance of liquid jets by the piezo actuator as they leave an orifice. This disturbance can be electronically tuned to produce uniform droplets with high repeatability. In another aspect, the droplet maker can be used to inject axially uniform diameter solution precursor droplets into process gas flow of a microwave plasma apparatus.