公开(公告)号：US09364862B2

公开(公告)日：2016-06-14

申请号：US14437616

申请日：2013-11-01

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury

IPC: B06B1/02

CPC classification number: B06B1/0292 ,  B06B2201/20 ,  B06B2201/40 ,  B06B2201/70

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 微阵列模块被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩形或矩形矩阵，并且可以单独地，选择性地或集体地激活以以大约100到170kHz之间的频率发射和接收反射光束信号。

公开(公告)号：US09857457B2

公开(公告)日：2018-01-02

申请号：US14768634

申请日：2014-03-12

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury

IPC: H02N1/06 ,  G01S7/52 ,  B81C1/00 ,  B06B1/02

CPC classification number: G01S7/52 ,  B06B1/0292 ,  B81C1/00269

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz.

公开(公告)号：US20150290678A1

公开(公告)日：2015-10-15

申请号：US14437616

申请日：2013-11-01

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury

IPC: B06B1/02

CPC classification number: B06B1/0292 ,  B06B2201/20 ,  B06B2201/40 ,  B06B2201/70

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 微阵列模块被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩形或矩形矩阵，并且可以单独地，选择性地或集体地激活以以大约100到170kHz之间的频率发射和接收反射光束信号。

公开(公告)号：US09187316B2

公开(公告)日：2015-11-17

申请号：US14331295

申请日：2014-07-15

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury ,  Aref Bakhtazad

IPC: H01L21/00 ,  B81C1/00

CPC classification number: B81C1/00269 ,  B06B1/0292 ,  H01L2924/1461

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The transducers include silicon device and backing layers joined by a fused benzocyclobutene (BCB) layer which defines the transducer air gap, and which are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a matrix and are activatable to emit and receive reflected beam signals at a frequency of between about 100 to 170 kHz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 换能器包括通过限定换能器空气间隙的稠合苯并环丁烯（BCB）层连接的硅装置和背衬层，它们被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩阵并且可激活以以大约100至170kHz的频率发射和接收反射的光束信号。

公开(公告)号：US09997425B2

公开(公告)日：2018-06-12

申请号：US15207797

申请日：2016-07-12

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury ,  Horst Schmidt

IPC: H01L23/00 ,  H01L23/31

CPC classification number: H01L23/31 ,  H01L21/4857 ,  H01L23/145 ,  H01L23/3121 ,  H01L23/49822 ,  H01L23/5389

Abstract: An integrated circuit includes stacked benzocyclobutene layers and a circuit geometry comprising conductive electric traces and interconnects on and/or extending through the BCB layers. A first said BCB layer formed and partially cured state. A top surface masked with photoresist, and after exposure, etched selectively form through vias at locations corresponding to conductive interconnects of the circuit geometry associated with said first BCB layer. A further mask coating is applied and after exposure, conductive metal is deposited to infill vias and form the electric traces of the circuit geometry. Subsequent BCB layers are then likewise formed, etched masked and coated in the same manner.

公开(公告)号：US09035532B2

公开(公告)日：2015-05-19

申请号：US13804279

申请日：2013-03-14

Applicant: UNIVERSITY OF WINDSOR

Inventor： Sazzadur Chowdhury

IPC: B06B1/02

CPC classification number: B06B1/0292

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 Hz.

Abstract translation: 一种传感器组件，包括一个或多个电容式微加工超声波换能器（CMUT）微阵列模块，其设置有多个单独的换能器。 微阵列模块被布置成在双曲抛物面几何中模拟或定向各个换能器。 传感器/传感器被布置成矩形或矩形矩阵，并且可以单独地，选择性地或集体地激活以以大约100至170Hz的频率发射和接收反射光束信号。