公开(公告)号：US20240003672A1

公开(公告)日：2024-01-04

申请号：US18037819

申请日：2021-11-22

Applicant: Universität Stuttgart

Inventor： Christof PRUß ,  Christian SCHOBER

IPC: G01B9/02001

CPC classification number: G01B9/02007 ,  G01B9/02039

Abstract: An interferometer for the measurement of a surface or an optical thickness of an optically smooth test object is provided, wherein the interferometer is configured to illuminate the optically smooth test object simultaneously with a plurality of object waves, which have different wavelengths from one another, and to superimpose the object waves 10 deformed by the illuminated test object onto coherent reference waves on an image capture device, and to spectrally decompose the interferograms resulting from the superposition into wavelength-specific partial interferograms.