公开(公告)号：EP0668490A3

公开(公告)日：1995-11-08

申请号：EP95300799.4

申请日：1995-02-09

Applicant: VAISALA OY

Inventor： Blomberg, Martti ,  Lehto, Ari ,  Orpana, Markku

IPC: G01J3/26

CPC classification number: G02B26/001 ,  G01J3/26

Abstract: The invention relates to an electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques for use in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength λ. According to the invention, the Fabry-Perot interferometer based sensor structure comprises a body block (1), two essentially parallel mirrors (41, 26) bonded to said body block (1), of which mirrors at least one (41) is partially transmitting and movable relative to the body block (1), said mirrors (41, 26) being spaced maximally by a few half-wavelengths, λ/2, from each other, and both of the mirror structures (41, 26) include integral electrode structures (6, 20) capable of effecting an electrostatic force between said mirror structures (41, 26). According to the invention, the movable mirror structure (41) is provided with structurally weakened regions (15) surrounding the optical area (24) of the mirror so as to facilitate keeping the optical area (24) at a maximum degree of flatness, and at least one (20) of the electrode structures is adapted to surround said optical area (24) so as to achieve a mechanical lever action and avoid galvanic contact between the electrode (20) of the movable mirror structure (41) and the electrode (6) of the fixed mirror structure (26).

公开(公告)号：EP0346127B1

公开(公告)日：1994-02-02

申请号：EP89305812.3

申请日：1989-06-08

Applicant: VAISALA OY ,  KEMIRA OY ,  NESTE OY ,  OUTOKUMPU OY ,  ENGICOM N.V.

Inventor： Lehto, Ari

IPC: G01N27/12

CPC classification number: G01N33/0009

公开(公告)号：EP0469733A2

公开(公告)日：1992-02-05

申请号：EP91306271.7

申请日：1991-07-11

Applicant: VAISALA OY

Inventor： Lehto, Ari

IPC: G01J3/10 ,  G01N21/35

CPC classification number: G01J3/108 ,  G01N21/3504 ,  G01N2201/06173

Abstract: The present invention relates to an apparatus and method for measuring the concentration of a gas. Said apparatus comprises a radiation source (70) for emitting radiation onto the gas (79) to be measured, whereby said radiation source (70) is comprised of an anode (4) and a cathode (9), and as an emitting fill gas the same gas as the gas (79) to be measured; and a radiation detector (74) with which the radiation transmitted through the gas (79) to be measured can be detected. According to the invention the cathode (9) functions as an electron emitter, and between said anode (4) and said cathode is connected such a low operating voltage that does not cause ionization or essential dissociation of the emitting gas. The design according to the invention provides an approximate temperature tracking of the radiation source with the ambient temperature.

Abstract translation: 本发明涉及一种用于测量气体浓度的装置和方法。 所述装置包括用于向待测量的气体（79）发射辐射的辐射源（70），由此所述辐射源（70）由阳极（4）和阴极（9）构成，并且作为发射填充气体 与要测量的气体（79）相同的气体; 以及辐射检测器（74），通过该辐射检测器可以检测透过待测量气体（79）的辐射。 根据本发明，阴极（9）用作电子发射体，并且在所述阳极（4）和所述阴极之间连接这样低的工作电压，其不会引起发射气体的电离或必要的解离。 根据本发明的设计提供了辐射源与环境温度的近似温度跟踪。

公开(公告)号：EP0346127A2

公开(公告)日：1989-12-13

申请号：EP89305812.3

申请日：1989-06-08

Applicant: VAISALA OY ,  KEMIRA OY ,  NESTE OY ,  OUTOKUMPU OY ,  ENGICOM N.V.

Inventor： Lehto, Ari

IPC: G01N27/12

CPC classification number: G01N33/0009

Abstract: A sensor for, e.g., the measurement of gas concentration, comprising a sensor element (8,10); a heating element (11) arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere temperature; and an electronics circuitry section (18), with which the desired electronical properties of the sensor element (8,10) can be measured and the heating element (11) of the sensor (8,10) can be controlled. The sensor element (8,10) and the electronics circuitry (18) are on the same planar substrate which has openings around the sensor element area (8,10) to the immediate vicinity of the area so that the openings (5,13,17) extend through the substrate (1,7), whereby the sensor area (8,10) is connected to the surrounding part of the substrate and, thence, to the electronics circuitry section (18), only along thin isthmuses (14) remaining between the openings.

Abstract translation: 用于例如测量气体浓度的传感器，包括传感器元件（8,10）; 与传感器结合布置的加热元件（11），传感器元件可以通过该加热元件达到高于环境气体气氛温度的温度; 以及可以测量传感器元件（8,10）的期望电子特性并且可以控制传感器（8,10）的加热元件（11）的电子电路部分（18）。 传感器元件（8,10）和电子电路（18）位于相同的平面基板上，该基板具有围绕传感器元件区域（8,10）的开口至该区域的紧邻，使得开口（5,13， 17）延伸穿过衬底（1,7），由此传感器区域（8,10）连接到衬底的周围部分，然后连接到电子电路部分（18），仅沿着薄的地峡（14） 保持在开口之间。

公开(公告)号：EP0776023A3

公开(公告)日：1997-11-05

申请号：EP96660084.3

申请日：1996-11-15

Applicant: VAISALA OY

Inventor： Blomberg, Martti ,  Torkkeli, Altti ,  Lindblad, Stefan ,  Lehto, Ari

IPC: H01K1/02 ,  H01K7/00 ,  H05B3/00

CPC classification number: H01K7/00 ,  G01J3/108 ,  H01K1/00 ,  H05B3/12 ,  H05B3/16

Abstract: The invention is related to an electrically modulatable thermal radiant source with a multilayer structure. The radiant source comprises a substrate (13), a first insulating layer (22) formed onto said substrate (13), a radiant surface layer (11) formed onto said first insulating layer (22), a second insulating layer (24) formed on said radiant surface layer (11), a first metallization (incandescent filament) layer (10) formed on said second insulating layer, a third insulating layer (26) formed on said first metallization layer, and a second metallization layer (15) for contacting formed on said third insulating layer (26). According to the invention, very thin incandescent filaments (10) are formed from said first metallization layer (10) and surrounded by the other elements (22, 11, 24, 26) of the multilayer structure as a uniform, planar plate.

公开(公告)号：EP0689229A2

公开(公告)日：1995-12-27

申请号：EP95304360.1

申请日：1995-06-21

Applicant: INSTRUMENTARIUM OY ,  VAISALA OY

Inventor： Blomberg, Martti ,  Orpana, Markku ,  Lehto, Ari ,  Kattelus, Hannu

IPC: H01K1/08 ,  H01K7/00

CPC classification number: H01K7/00 ,  G01J5/522 ,  H01K1/02

Abstract: The invention is related to an electrically modulatable radiant source comprising an essentially planar substrate (1), a well (2) or hole formed into the substrate (1), at least one incandescent filament (3) attached to the substrate (1), said filament being aligned at said well (2) or hole, and contact pads (5) formed onto the substrate (1) at both ends of the incandescent filament (3) for feeding electric current to the incandescent filament (3). According to the invention, the incandescent filament (3) is made from a metal and coated with a continuous thin film (32, 36) at least for the parts floating free from the substrate (1).

Abstract translation: 本发明涉及一种电可调节辐射源，其包括基本上平面的基底（1），形成于基底（1）中的孔（2）或孔，附着到基底（1）上的至少一个白炽丝（3） 所述灯丝在所述阱（2）或孔处对准，以及在白炽灯丝（3）的两端形成在基板（1）上的接触焊盘（5），用于将电流馈送到白炽灯丝（3）。 根据本发明，白炽灯丝（3）由金属制成，并且至少对于从衬底（1）浮起的部分至少涂覆有连续的薄膜（32,36）。

公开(公告)号：EP0668490A2

公开(公告)日：1995-08-23

申请号：EP95300799.4

申请日：1995-02-09

Applicant: VAISALA OY

Inventor： Blomberg, Martti ,  Lehto, Ari ,  Orpana, Markku

IPC: G01J3/26

CPC classification number: G02B26/001 ,  G01J3/26

Abstract: The invention relates to an electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques for use in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength λ. According to the invention, the Fabry-Perot interferometer based sensor structure comprises a body block (1), two essentially parallel mirrors (41, 26) bonded to said body block (1), of which mirrors at least one (41) is partially transmitting and movable relative to the body block (1), said mirrors (41, 26) being spaced maximally by a few half-wavelengths, λ/2, from each other, and both of the mirror structures (41, 26) include integral electrode structures (6, 20) capable of effecting an electrostatic force between said mirror structures (41, 26). According to the invention, the movable mirror structure (41) is provided with structurally weakened regions (15) surrounding the optical area (24) of the mirror so as to facilitate keeping the optical area (24) at a maximum degree of flatness, and at least one (20) of the electrode structures is adapted to surround said optical area (24) so as to achieve a mechanical lever action and avoid galvanic contact between the electrode (20) of the movable mirror structure (41) and the electrode (6) of the fixed mirror structure (26).

Abstract translation: 本发明涉及到静电通过表面微机械技术用于光学材料分析用作光学扫滤波器，其中所述光学测定波长在波长为λ为中心产生的可调谐的法布里 - 珀罗干涉仪。 。根据本发明，所述法布里 - 珀罗干涉仪的基于传感器结构包括结合到所述主体块（1），其中反射镜的至少一个（41）被部分地一体块（1），两个基本上平行的反射镜（41，26） 发射和可相对于所述主体块（1），所述反射镜（41，26）由最大几个半波长间隔，波长/ 2，从海誓山盟，和两个反射镜结构（41，26）包括一体 电极结构（6，20）能够实现对所述反射镜结构之间的静电力（41，26）。 。根据本发明，可动反射镜结构（41）上设置有围绕所述反射镜的光学上的区域（24）在结构上削弱区域（15），以便于保持光学上的区域（24）在平坦度的最大程度，并且 至少一个电极结构（20）是angepasst以围绕所述光学区域（24），以便实现机械杠杆作用，并避免可动反射镜结构的电极（20）（41）和所述电极之间的电接触（ （6）固定反射镜结构26的）。

公开(公告)号：EP0689229A3

公开(公告)日：1996-07-10

申请号：EP95304360.1

申请日：1995-06-21

Applicant: INSTRUMENTARIUM OY ,  VAISALA OY

Inventor： Blomberg, Martti ,  Orpana, Markku ,  Lehto, Ari ,  Kattelus, Hannu

IPC: H01K1/08 ,  H01K7/00

CPC classification number: H01K7/00 ,  G01J5/522 ,  H01K1/02

Abstract: The invention is related to an electrically modulatable radiant source comprising an essentially planar substrate (1), a well (2) or hole formed into the substrate (1), at least one incandescent filament (3) attached to the substrate (1), said filament being aligned at said well (2) or hole, and contact pads (5) formed onto the substrate (1) at both ends of the incandescent filament (3) for feeding electric current to the incandescent filament (3). According to the invention, the incandescent filament (3) is made from a metal and coated with a continuous thin film (32, 36) at least for the parts floating free from the substrate (1).

公开(公告)号：EP0469733A3

公开(公告)日：1992-05-27

申请号：EP91306271.7

申请日：1991-07-11

Applicant: VAISALA OY

Inventor： Lehto, Ari

IPC: G01J3/10 ,  G01N21/35

CPC classification number: G01J3/108 ,  G01N21/3504 ,  G01N2201/06173

Abstract: The present invention relates to an apparatus and method for measuring the concentration of a gas. Said apparatus comprises a radiation source (70) for emitting radiation onto the gas (79) to be measured, whereby said radiation source (70) is comprised of an anode (4) and a cathode (9), and as an emitting fill gas the same gas as the gas (79) to be measured; and a radiation detector (74) with which the radiation transmitted through the gas (79) to be measured can be detected. According to the invention the cathode (9) functions as an electron emitter, and between said anode (4) and said cathode is connected such a low operating voltage that does not cause ionization or essential dissociation of the emitting gas. The design according to the invention provides an approximate temperature tracking of the radiation source with the ambient temperature.

Abstract translation: 本发明涉及一种用于测量气体浓度的装置和方法。 所述装置包括用于向待测量的气体（79）发射辐射的辐射源（70），由此所述辐射源（70）由阳极（4）和阴极（9）构成，并且作为发射填充气体 与要测量的气体（79）相同的气体; 以及辐射检测器（74），通过该辐射检测器可以检测透过待测量气体（79）的辐射。 根据本发明，阴极（9）用作电子发射体，并且在所述阳极（4）和所述阴极之间连接这样低的工作电压，其不会引起发射气体的电离或必要的解离。 根据本发明的设计提供了辐射源与环境温度的近似温度跟踪。

公开(公告)号：EP0709659A3

公开(公告)日：1997-01-08

申请号：EP95117079.4

申请日：1995-10-30

Applicant: VALTION TEKNILLINEN TUTKIMUSKESKUS ,  VAISALA OY

Inventor： Lehto, Ari ,  Lindblad, Stefan ,  Torkkeli, Altti ,  Blomberg, Martti

IPC: G01J3/26 ,  G01J3/10

CPC classification number: G01J3/26 ,  G01J3/0256 ,  G01J3/0259

Abstract: The invention relates to a miniaturized spectrometer for gas concentration measurement. The spectrometer comprises a radiation source (3) for admitting electromagnetic radiation onto the gas to be measured, a detector (5) for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer (4) placed in the path of the radiation prior to the detector (5), control electronics circuitry (2) for controlling the radiation source (3), the interferometer (4) and the detector (5). According to the invention, the radiation source (3), the detector (5), the interferometer (4) and the control electronics (2) are integrated in a miniaturized fashion onto a common, planar substrate (1) and the radiation source (3) is an electrically modulatable micromechanically manufactured thermal radiation emitter.