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公开(公告)号:DE112004000353T5
公开(公告)日:2006-01-26
申请号:DE112004000353
申请日:2004-02-11
Applicant: VTI TECHNOLOGIES OY VANTAA
Inventor: KUISMA HEIKKI , LAHDENPERAE JUHA , MUTIKAINEN RISTO
IPC: B81B3/00 , B81B7/00 , B81C1/00 , G01P15/08 , G01P15/125
Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.
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公开(公告)号:DE10392273T5
公开(公告)日:2005-03-10
申请号:DE10392273
申请日:2003-02-10
Applicant: VTI TECHNOLOGIES OY VANTAA
Inventor: KUISMA HEIKKI , LAHDENPERAE JUHA , MUTIKAINEN RISTO
IPC: G01L9/00 , G01L19/04 , G01P15/08 , G01P15/125 , G01L9/12
Abstract: A method of manufacturing a sensor including forming an insulating layer on top of a conductive substrate, and forming a conducting electrode on top of the insulating layer. Further, the insulating layer is formed to include support areas formed at edges of the conducting electrode and a partial area formed under the conducting electrode, and a thickness (d 2 ) of the partial area of the insulating layer is less than a thickness (d 1 ) of the support areas of the insulating area.
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