OPTICAL MONITOR
    1.
    发明申请
    OPTICAL MONITOR 审中-公开

    公开(公告)号:WO2021003076A1

    公开(公告)日:2021-01-07

    申请号:PCT/US2020/039946

    申请日:2020-06-26

    Abstract: A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.

    OPTICAL SPECTROMETER
    3.
    发明公开

    公开(公告)号:EP4556968A2

    公开(公告)日:2025-05-21

    申请号:EP25168783.6

    申请日:2016-08-03

    Abstract: An optical assembly is disclosed comprising an elbowed optical conduit comprising a first surface, a second surface, and a third surface, wherein the third surface is configured to receive signal light from the first surface and reflect the signal light towards the second surface; a first laterally variable bandpass optical filter optically coupled to the second surface and configured to receive the signal light propagated in the elbowed optical conduit; a second laterally variable bandpass optical filter arranged at a distance from the first laterally variable bandpass optical filter; and a sensor coupled to the second laterally variable bandpass optical filter; wherein the first laterally variable bandpass optical filter has a first bandpass center wavelength; and wherein the second laterally variable bandpass optical filter has a second bandpass center wavelength.

Patent Agency Ranking