公开(公告)号：US20170017074A1

公开(公告)日：2017-01-19

申请号：US15280557

申请日：2016-09-29

Applicant: WASEDA UNIVERSITY

Inventor： Eiji Iwase ,  Chisa Iino

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC classification number: G02B26/0833 ,  B81B3/00 ,  B81B3/0062 ,  B81B2201/042 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/101

Abstract: Provided is a micro drive unit, which is capable of performing multi-axis drive, the micro drive unit including: a movable object; and at least one pair of beams configured to pivotally support the movable object and formed only in one direction, the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams, thereby being capable of simultaneously avoiding upsizing and complication of the structure. And by incorporating the micro drive unit, a micro device capable of achieving multi-axis drive can be manufactured.

Abstract translation: 提供能够执行多轴驱动的微驱动单元，所述微驱动单元包括：可移动物体; 以及至少一对梁，其被构造成枢转地支撑所述可移动物体并仅在一个方向上形成，所述可移动物体被构造成在x轴方向，y轴方向和z轴方向上旋转或平移， 所述至少一对光束在所述至少一对光束的一个或多个谐振频率处被扭曲或弯曲，从而能够同时避免所述结构的大尺寸和复杂化。 通过并入微驱动单元，可以制造能够实现多轴驱动的微型装置。

公开(公告)号：US10222608B2

公开(公告)日：2019-03-05

申请号：US15280557

申请日：2016-09-29

Applicant: WASEDA UNIVERSITY

Inventor： Eiji Iwase ,  Chisa Iino

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

Abstract: Provided is a micro drive unit, which is capable of performing multi-axis drive, the micro drive unit including: a movable object; and at least one pair of beams configured to pivotally support the movable object and formed only in one direction, the movable object being configured to rotate or translate in an x-axis direction, a y-axis direction, and a z-axis direction when the at least one pair of beams is twisted or bent at one or a plurality of resonant frequencies of the at least one pair of beams, thereby being capable of simultaneously avoiding upsizing and complication of the structure. And by incorporating the micro drive unit, a micro device capable of achieving multi-axis drive can be manufactured.