公开(公告)号：WO2019200049A1

公开(公告)日：2019-10-17

申请号：PCT/US2019/026914

申请日：2019-04-11

Applicant: WISYS TECHNOLOGY FOUNDATION, INC.

Inventor： GOPALAKRISHNAN, Gokul ,  LEVENSTEIN, Mark Elliot

IPC: G03F7/00 ,  G03F1/80 ,  G03F7/20 ,  H01L21/027 ,  H01L21/311 ,  H01L21/306

Abstract: Methods for making molecular sieves are provided. The molecular sieves are comprised of thin semiconductors films in which a plurality of apertures is defined. The apertures are non-circular, nanoscale openings with tapered sidewalls that selectively pass certain molecules, while discriminating against the passage of other molecules.